Sensor / Sensing Element Semiconductor Metrology Instruments Datasheets

Wafer Reader -- In-Sight® 1740 series
from Cognex Corporation

The intensely competitive global semiconductor industry demands ever more rigorous control of increasingly complex processes in order to maximize tool utilization and production yield; there is zero margin for error. The need to track wafers throughout back-end processing has never been more vital... [See More]

  • Form Factor: Sensor or sensing element
  • Measurements: Automatic Identification for Wafer Traceability
  • Applications: Wafer
Geometry Inspection System for Silicon Ingots
from Micro-Epsilon Group

The “dimensionCONTROL 8260 for Ingot ” measuring system inspects the surface of the bricks using several laser line scanners and in doing so measures the side lengths, phase lengths, angles, diagonal surfaces and the planarity of the side surfaces completely automatically. The system... [See More]

  • Form Factor: Sensor or sensing element
  • Measurements: Defects, dimples or film residues; Flatness
  • Applications: Wafer
  • Wafer / Part Size: 0 to 2500
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Technology: Interferometer
  • Mounting / Loading: In-line; Floor
  • Applications: Wafer; Packaged IC or substrate
APTI Wafers
from KLA-Tencor Corporation

APTI (Arrays of Peak Temperature Indicators) is a unique temperature measurement tool from SensArray for measuring and profiling peak temperature across the wafer using non-reversible temperature indicators. APTI is ideally suited for plasma, wet processes, copper deposition, and other semiconductor... [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer
  • Technology: Arrays of Peak Temperature Indicators
  • Measurements: Peak Temperature
Semi-Automated Wafer Measurement System -- Proforma™ 200SA
from MTI Instruments Inc.

The Proforma 200SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 75 to 200 mm. wafers, the 200SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Applications: Wafer
CRTS Series -- CRTS-0
from ULVAC Technologies, Inc.

Sensor with no water cooling pipe jacket [See More]

  • Form Factor: Sensor or sensing element
  • Measurements: FilmThickness
  • Applications: Wafer; CVD / PVD
  • Features: Noncontact; Non-destructive
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer; CVD / PVD; Photolithography
  • Technology: Optical / Imaging
  • Features: Noncontact; Non-destructive