eDR-5210
from KLA-Tencor Corporation

KLA-Tencor ’s eDR-52xx wafer defect review systems capture high resolution images of wafer defects detected by inspection tools. These images enable defect classification, helping chipmakers to identify systematic defect sources and resolve yield issues. The latest addition to the eDR-52xx... [See More]

  • Technology: Electron beam probe
  • Mounting / Loading: Floor
  • Form Factor: ProbingSystem
  • Applications: Wafer; Photolithography