Profilometer / AFM Semiconductor Metrology Instruments Datasheets

Metrology Solutions for Semiconductors
from Bruker Corporation

Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker ™s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide... [See More]

  • Technology: Profilometer or AFM (optional feature); X-ray Diffractometer (optional feature)
  • Measurements: Defects, dimples or film residues (optional feature); Roughness / Waviness (optional feature)
  • Applications: Wafer; C-S Thin Film Materials
SpectraCD 100
from KLA-Tencor Corporation

Provides process control information beyond one-dimensional CD. Offers real-time site-by-site CD, height or depth, sidewall angle and profile information with each measurement for maximum productivity. Performs thin film and CD metrology using Spectroscopic Ellipsometry (SE) technology system,... [See More]

  • Technology: Ellipsometer; Profilometer or AFM; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: Floor
  • Form Factor: ProbingSystem
  • Applications: Wafer
XE-3DM
from Park Systems, Inc.

Park Systems has revolutionized the AFM with the introduction of the XE-3DM, the fully automated AFM system designed for overhang and trench profiles, sidewall roughness and imaging, and critical angle measurements. The unique design of the XE-3DM, made possible by the XE-series ’ decoupled XY... [See More]

  • Technology: Profilometer or AFM
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer