Process XRR, XRF, and XRD Metrology FAB Tool -- MFM65
from Rigaku Corporation

The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. The... [See More]

  • Technology: Reflectometer; X-ray Diffractometer; XRR, XRF, XRD
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Applications: Wafer