25A 2 MHz RF Plasma Generators -- NOVA-25
from MKS Instruments, Inc.

NOVA ® Series generators offer advancedRF plasma generation and control for low cost and high yield in themost demanding thin film processing applications. The NOVA ® RF Plasma Generators are ideally suited for PlasmaEnhanced Chemical Vapor Deposition (PECVD), High Density Plasma... [See More]

  • Device Type: RF Generator
  • Style: Enclosed; Rack Mount
  • Output Power: 3.35 to 36715
  • Phase  : Three-Phase