MEMS Pressure Instruments Datasheets

971 UniMag Cold Cathode Transducer -- 971
from MKS Instruments, Inc.

The 971 UniMag ™ transducer offers a measurement range from 1x10-8 Torr to 5x10-3Torr and is based on cold cathode inverted magnetron sensor technology.The 971 is a cost effective solution for base pressure measurement andcontrol. In addition to its small size, broad range and lower cost,... [See More]

  • Sensor Technology: Utilizes MEMS; Cold Cathode Inverted
  • Pressure Measurement: Gauge; Vacuum
  • Device Category: Instrument or Meter
  • Material: Gas