MEMS Pressure Instruments Datasheets
from MKS Instruments, Inc.
The 971 UniMag transducer offers a measurement range from 1x10-8 Torr to 5x10-3Torr and is based on cold cathode inverted magnetron sensor technology.The 971 is a cost effective solution for base pressure measurement andcontrol. In addition to its small size, broad range and lower cost,... [See More]
- Sensor Technology: Utilizes MEMS; Cold Cathode Inverted
- Pressure Measurement: Gauge; Vacuum
- Device Category: Instrument or Meter
- Material: Gas