FFT Analysis Surface Metrology Equipment Datasheets

MicroXAM - 100
from KLA-Tencor Corporation

The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profiling solution focusing on the needs of the engineering and research community. Our 3D surface profiler products are designed to match the varied requirements of our customers through the delivery of full... [See More]

  • Display & Special Features: FFT Analysis; PC Interface / Networkable
  • Technology: Optical / Laser
  • Measurement Capability: Surface Profilometry; Area or three dimensional profile; Step Height; Roughness
  • Applications: MEMS; Semiconductors; Medical
3D Optical Profiler -- NewView™ 600s
from Zygo Corporation

Fast 3D noncontact profilometer, manual benchtop unit [See More]

  • Display & Special Features: Video / Graphic Display; FFT Analysis; Power Spectrum Density (PSD); PC Interface / Networkable; SPC or Analysis Software; Stage, 0.5X-100X Objectives, 1X Zoom
  • Standards Compliance: ASME; ISO / EN; DIN; JIS
  • Measurement Capability: Form; Surface Profilometry; 2D / Line Profile; Area or three dimensional profile; Flatness; Hybrid Parameters; Spacing; Step Height; Thickness; Waviness; Roughness; Defects, dimples or film residues; Lay / Pattern; Warp / Bow; Swedish Height (H), Peak Density, Summit Spacing & Density, 3D Surface Visualization
  • Technology: Optical / Laser