FFT Analysis Surface Metrology Equipment Datasheets

MicroXAM - 100
from KLA-Tencor Corporation

The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profiling solution focusing on the needs of the engineering and research community. Our 3D surface profiler products are designed to match the varied requirements of our customers through the delivery of full... [See More]

  • Display & Special Features: FFT Analysis; PC Interface / Networkable
  • Technology: Optical / Laser
  • Measurement Capability: Surface Profilometry; Area or three dimensional profile; Step Height; Roughness
  • Applications: MEMS; Semiconductors; Medical