Spacing Parameters (PC, Sm) Surface Metrology Equipment Datasheets

P-16+
from KLA-Tencor Corporation

The P-16+ stylus profiler is a surface metrology analysis solution used in a wide range of applications and industries, from R &D departments and universities to production and process monitoring. This surface analysis solution's precise force control provides excellent vertical resolution,... [See More]

  • Measurement Capability: Surface Profilometry; 2D / Line Profile; Area or three dimensional profile; Spacing; Step Height; Waviness; Roughness
  • Applications: MEMS; Semiconductors; Coatings / Films; Electronics; Storage Media
  • Technology: Contact / Stylus
  • Repeatability: 6 Angstrom Step Height Repeatability
3D Optical Profiler -- NewView™ 600s
from Zygo Corporation

Fast 3D noncontact profilometer, manual benchtop unit [See More]

  • Measurement Capability: Form; Surface Profilometry; 2D / Line Profile; Area or three dimensional profile; Flatness; Hybrid Parameters; Spacing; Step Height; Thickness; Waviness; Roughness; Defects, dimples or film residues; Lay / Pattern; Warp / Bow; Swedish Height (H), Peak Density, Summit Spacing & Density, 3D Surface Visualization
  • Technology: Optical / Laser
  • Standards Compliance: ASME; ISO / EN; DIN; JIS
  • Applications: Laboratory Research; Aerospace / Defense; Automotive; Bearings, Gears, Shafting, Seals, etc.; Flat Panel Display; Nanomaterials; Optics / Photonics; Precision Machining / Grinding; Coatings / Films; Electronics; Medical; Wear / Triolobogy; Production or Factory Use; Bore / ID Analysis (optional feature)