Semiconductor Manufacturing High Vacuum Pumps Datasheets

TURBOVAC MAG DIGITAL Magnetic Rotor Suspension -- 1500 CT
from Leybold USA Inc.

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10-1 mbar (0.75 •10-1Torr) to 10-10 mbar (0.75 •10-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level,... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2585
Oil-Free Turbomolecular Pumping Station -- FJ-700E
from Drytek Distribution

FJ –700E pumping station is a ready-to-run pumping system with oil-free design. It consists of a KYKY 700 turbomolecular pump (grease lubrication bearing), a scroll pump (oil-free backing pump), a controller system, a vacuum measurement ,valves and pipelines. Applications: surface... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1483
EMT Series Turbomolecular Pump -- EMT1300
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 3.8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1300
EPX On-tool High Vacuum Pump -- EPX180L
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
from ULVAC Technologies, Inc.

Ultra-clean vacuum, low operating cost, mount in any orientation [See More]

  • Application: Industrial; Semiconductor
  • Pumping Speed: 19070
  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Cryogenic or Cryosorption