COOLVAC 1.500 CL -- 844200V0002
from Oerlikon Leybold Vacuum USA Inc.

Hydrocarbon-free high vacuum. High capacity for argon and hydrogen. High crossover value. Simple operation. Trouble-free integration into complex systems. Fully automatic regeneration through Cryo Compact Control. Easy servicing [See More]

  • Application: Industrial; Scientific; Semiconductor; Evaporators / Ion Implanters
  • Ultimate Vacuum: 0.0013
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 9747
Maglev Hybrid Turbomolecular Pump -- ATH 1300 M/T
from Adixen

High throughput applications. ATH 500 M, ATH 1300 M, ATH 1600 M and ATH 2303 M are designed for high pressure, high throughput pumping needed for coating, photovoltaic and other industrial applications. 5 corrosion proof features. • Automatic balancing system. • Built-in 75 °C heating... [See More]

  • Application: Industrial; Scientific; Manufacturing; Medical / Laboratory; Pharm/Sanitary; Semiconductor; Micro Machining, Coating, R&D
  • Ultimate Vacuum: 6.00E-9
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 2649
Oil-Free Turbomolecular Pumping Station -- FJ-700E
from Drytek Distribution

FJ –700E pumping station is a ready-to-run pumping system with oil-free design. It consists of a KYKY 700 turbomolecular pump (grease lubrication bearing), a scroll pump (oil-free backing pump), a controller system, a vacuum measurement,valves and pipelines. Applications: surface... [See More]

  • Application: Industrial; Scientific; Semiconductor; Accelerator, Surface Analyses, Plasma
  • Ultimate Vacuum: 4.50E-10 to 4.50E-9
  • Configuration: Vacuum Pump System or Station
  • Pumping Speed: 1483
EMT Series Turbomolecular Pump -- EMT1300
from EBARA Technologies, Inc.

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr. The temperature... [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 3.8
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 1300
EPX On-tool High Vacuum Pump -- EPX180L
from Edwards Vacuum

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular... [See More]

  • Application: Semiconductor
  • Ultimate Vacuum: 7.50E-5
  • Configuration: Individual Vacuum Pump
  • Pumping Speed: 99.96
SP-150 -- 500000
from MDC Vacuum Products LLC

Aluminum body SS neck, sorbent material vacuum pump, N2 required [See More]

  • Application: Industrial; Semiconductor
  • Ultimate Vacuum: 0.0050
  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Cryogenic or Cryosorption
CRYO-TORR Series -- CRYO-TORR10
from ULVAC Technologies, Inc.

Ultra-clean vacuum, low operating cost, mount in any orientation [See More]

  • Application: Industrial; Semiconductor
  • Pumping Speed: 19070
  • Configuration: Individual Vacuum Pump
  • UHV / High Vacuum: Cryogenic or Cryosorption