Power Source:Other High Vacuum Pumps Datasheets
from Oerlikon Leybold Vacuum USA Inc.
Active 5-axis magnetic bearing system. Patented KEPLA-COAT ® for rotor and stator to prevent corrosion. Low noise and vibration levels. Installation in any orientation. Advanced rotor design for high throughput. Integrated purge gas system. CT versions: Integrated temperature management system [See More]
- Configuration: Individual Vacuum Pump
- Pumping Speed: 3814
- Ultimate Vacuum: 7.50E-9
- UHV / High Vacuum: Turbomolecular