Combination / Multi-Technology Pump High Vacuum Pumps Datasheets

ET-WS Series Turbo Pump -- ET-1301WS
from EBARA Technologies, Inc.

The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr. The ET-WS Series turbomolecular... [See More]

  • Configuration: Combination
  • Pumping Speed: 636 to 3390
  • Ultimate Vacuum: 1.00E-6
  • UHV / High Vacuum: Turbomolecular
from Metallurgical High Vacuum Corporation

49 inches L x 29 W x 52 H, 2400 lbs, water cooled ~2 gpm [See More]

  • Configuration: Individual Vacuum Pump; Combination (optional feature)
  • Pumping Speed: 300
  • Ultimate Vacuum: 0.0200 to 0.0500
  • Mechanical: Rotary
VPC Series -- VPC-050
from ULVAC Technologies, Inc.

It is a small type high vacuum pumping system that necessary parts are compactly placed in a pipe-framed stand. It is easy to handle, maintain, and suitable for experiment. [See More]

  • Configuration: Combination
  • Pumping Speed: 106
  • Ultimate Vacuum: 5.25E-6
  • UHV / High Vacuum: Diffusion or Vapor