Electro-pneumatic Vacuum Valves Datasheets

Stainless Steel Tube Valves
from Agilent Vacuum Technologies

Agilent ’s family of vacuum Stainless Steel Tube Valves are designed to connect our rough vacuum and high vacuum pumps to your system. Delivering maximum conductance and sized for easy, convenient installation, these valves are ideally suited for systems requiring high reliability with low... [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 0.7500 to 1.5
  • Type: Inline; Angle; Tube Valve
  • Leak Rate: 1.00E-9
CF Electropneumatic UHV Gate Valve -- 286 89
from Leybold USA Inc.

Double-acting electropneumatic actuator (with position indicator and pilot valve). Bellows-sealed push gate feedthrough. Valve and pneumatic drive can be degassed at temperatures up to 250 °C and 200 °C respectively. Steel body (non-rusting). Low play in the locked state and low wear. [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 4.47
  • Type: Gate
  • ISO Port Flange Size: NW 63
Compact Vacuum Valve -- NW40-CRV
from MKS Instruments, Inc.

The Corrosion and Ozone Resistant Valve is designed for use in harsh environments, employing patented technology to completely seal off the valve bellows while the valve is in the open processing position. Aluminum or stainless shields protect the bellows from corrosive process gases, while a unique... [See More]

  • Valve Actuation: Pneumatic (optional feature); Electropneumatic (optional feature)
  • Port OD: 1.5
  • Type: Inline; Angle (optional feature)
  • Leak Rate: 1.00E-9