Electro-pneumatic Vacuum Valves Datasheets

Stainless Steel Tube Valves
from Agilent Vacuum Technologies

Agilent ’s family of vacuum Stainless Steel Tube Valves are designed to connect our rough vacuum and high vacuum pumps to your system. Delivering maximum conductance and sized for easy, convenient installation, these valves are ideally suited for systems requiring high reliability with low... [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 0.7500 to 1.5
  • Type: Inline; Angle; Tube Valve
  • Leak Rate: 1.00E-9
HV / UHV Gate Valve
from Leybold USA Inc.

Vacuum technology puts great demands on the functioning and reliability of the valves. The demands are fulfilled only if correct shut-off devices are installed for each application, depending on the method of construction, method of operation, and size. Moreover, in the construction and operation of... [See More]

  • Valve Actuation: Electropneumatic
  • Port Flange & Seal Type: DN 200 CF
  • Type: Gate
  • Valve Seat Seal: Elastomeric / O-ring
Electronic Vacuum Regulators
from Equilibar, LLC.

Equilibar electronic vacuum regulators are available in 1/4 to 4 inch sizes to handle all flow rates. The innovative design has more than 5X the flow stability of traditional spring regulators. That means that your vacuum process can remain stable even as gas flow rate changes over wide ranges. [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 0.2500 to 4
  • Type: Inline; Diamphragm
  • Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr)
Compact Vacuum Valve -- NW40-CRV
from MKS Instruments, Inc.

The Corrosion and Ozone Resistant Valve is designed for use in harsh environments, employing patented technology to completely seal off the valve bellows while the valve is in the open processing position. Aluminum or stainless shields protect the bellows from corrosive process gases, while a unique... [See More]

  • Valve Actuation: Pneumatic (optional feature); Electropneumatic (optional feature)
  • Port OD: 1.5
  • Type: Inline; Angle (optional feature)
  • Leak Rate: 1.00E-9