Electro-pneumatic Vacuum Valves Datasheets

CF Electropneumatic UHV Gate Valve -- 286 89
from Oerlikon Leybold Vacuum USA Inc.

Double-acting electropneumatic actuator (with position indicator and pilot valve). Bellows-sealed push gate feedthrough. Valve and pneumatic drive can be degassed at temperatures up to 250 °C and 200 °C respectively. Steel body (non-rusting). Low play in the locked state and low wear. [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 4.47
  • Type: Gate
  • ISO Port Flange Size: NW 63
VV213P Series
from Danfoss, Inc. - Industrial Automation Division

VV213P is a range of pneumatically operated 2/2-way valves for use in high vacuum applications such as laboratory set-ups or automated industrial applications. The valves can be operated directly or by an optional solenoid valve kit. For the VV213P an optional electrically position sensor can be... [See More]

  • Valve Actuation: Pneumatic (optional feature); Electropneumatic (optional feature)
  • ISO Port Flange Size: NW 16 (optional feature); NW 20 (optional feature); NW 25 (optional feature); NW 32 (optional feature); NW 40  (optional feature); NW 50 (optional feature)
  • Type: Inline (optional feature); Angle (optional feature)
  • Vacuum / Pressure Range: (HV, < 10-3, >10-8 torr)
Compact Vacuum Valve -- NW40-CRV
from MKS Instruments, Inc.

The Corrosion and Ozone Resistant Valve is designed for use in harsh environments, employing patented technology to completely seal off the valve bellows while the valve is in the open processing position. Aluminum or stainless shields protect the bellows from corrosive process gases, while a unique... [See More]

  • Valve Actuation: Pneumatic (optional feature); Electropneumatic (optional feature)
  • Port OD: 1.5
  • Type: Inline; Angle (optional feature)
  • Leak Rate: 1.00E-9