Electro-pneumatic Vacuum Valves Datasheets

Electronic Vacuum Regulators
from Equilibar, LLC.

Equilibar electronic vacuum regulators are available in 1/4 to 4 inch sizes to handle all flow rates. The innovative design has more than 5X the flow stability of traditional spring regulators. That means that your vacuum process can remain stable even as gas flow rate changes over wide ranges. [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 0.2500 to 4
  • Type: Inline; Diamphragm
  • Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr)
CF Electropneumatic UHV Gate Valve -- 286 89
from Oerlikon Leybold Vacuum USA Inc.

Double-acting electropneumatic actuator (with position indicator and pilot valve). Bellows-sealed push gate feedthrough. Valve and pneumatic drive can be degassed at temperatures up to 250 °C and 200 °C respectively. Steel body (non-rusting). Low play in the locked state and low wear. [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 4.47
  • Type: Gate
  • ISO Port Flange Size: NW 63
1" HV Series Angle Valve -- 311022
from MDC Vacuum Products LLC

310 Series Humphrey solenoid valve, horizontal or vertical mounting [See More]

  • Valve Actuation: Electropneumatic
  • Port OD: 1
  • Type: Angle
  • Leak Rate: 2.00E-10
Compact Vacuum Valve -- NW40-CRV
from MKS Instruments, Inc.

The Corrosion and Ozone Resistant Valve is designed for use in harsh environments, employing patented technology to completely seal off the valve bellows while the valve is in the open processing position. Aluminum or stainless shields protect the bellows from corrosive process gases, while a unique... [See More]

  • Valve Actuation: Pneumatic (optional feature); Electropneumatic (optional feature)
  • Port OD: 1.5
  • Type: Inline; Angle (optional feature)
  • Leak Rate: 1.00E-9