Valve Actuation:Other Vacuum Valves Datasheets
from MKS Instruments, Inc.
The MKS, HPS ® Products Series 225AUTO-SOFT ® is a flow actuated check valve used for throttling roughingpumps during initial evacuation. AUTO-SOFT ® closes very quickly at thestart of system evacuation and opens automatically upon reaching a setpressure differential. This leaves the... [See More]
- Type: Check Valve
- ISO Port Flange Size: NW 40 (optional feature); NW 50 (optional feature)
- Port OD: 1.5 to 2
- Vacuum / Pressure Range: Low or roughing vacuum level (> 1 torr)