HPS® Two-stage, Pneumatic Valves -- MKS, HPS® Two-stage Valves
from MKS Instruments, Inc.

Traditionally, the method to soft start a vacuum system had been to run a secondary bypass line with a small orifice valve around the main vacuum isolation valve. The use of bypass lines in semiconductor nitride and etch processes requires special engineered designs that are hardware intensive. [See More]

  • Features: Bellows; Multi-stage; Limit Switch Option
  • Port OD: 1 to 4
  • Type: Inline (optional feature); Angle (optional feature)
  • ISO Port Flange Size: NW 100