from MKS Instruments, Inc.
Traditionally, the method to soft start a vacuum system had been to run a secondary bypass line with a small orifice valve around the main vacuum isolation valve. The use of bypass lines in semiconductor nitride and etch processes requires special engineered designs that are hardware intensive. [See More]
- Features: Bellows; Multi-stage; Limit Switch Option
- Port OD: 1 to 4
- Type: Inline (optional feature); Angle (optional feature)
- ISO Port Flange Size: NW 100