Product Announcements: Semiconductor Wet Process Equipment

Wafer carriers that support automated semiconductor handling equipment.

• No Minimums Required
• Standard or Custom Sizes
• Multiple Materials
• Made in the USA
• Quick Turnaround

JST's dry to dry, batch metal liftoff tool can also be used for photoresist stripping. This is an easy to load, single chamber tool that uses fluid transfer to process. Metal lift off or stripping is accomplished using JST's spray under immersion technology. Metals or photoresist is gently lifted off the product and removed via our downflow technology. (read more)

Linear transfer systems designed for process stations that are using more than three or four baths. (read more)

Edwards, a leading global supplier of vacuum and abatement equipment and services, today introduced the Sirius™ 6000 abatement system. Designed for low cost-of-ownership, the Sirius 6000 system addresses greenhouse gas abatement challenges arising from dielectric and polysilicon etch processes used in semiconductor manufacturing. (read more)

Extend the Life of your Wet Process Systems, SRDs & Chemical Delivery Systems

MEI extends the usable life of wet processing equipment, from wet systems and dryers, to processes and plumbing. Our wet process system retrofits, reconditioning and upgrade work includes manual wet benches, and semi-automated or fully automated processing equipment, SRDs & chemical delivery systems. (read more)

The MEI Evolution series wet processing systems are in-line, configurable, automated, modular, linear batch immersion wet systems made for high throughput at a low cost. Provides Dry in and dry out batch wafer processing of multiple lots of wafers from 100mm to 300mm. SECS/GEM interface, SEMI S2. (read more)

The MEI Advancer series wet processing system is a highly configurable, semi-automated modular, front to back side mount robotic wet station, suitable for a wide variety of etch, strip and clean steps. Applications include processing for solar cells, IC devices, medical device manufacturing, MEMS and parts cleaning. (read more)