Product Announcements: Semiconductor Wet Process Equipment

Edwards offers a unique range of equipment, support services and technical expertise to meet application needs in the manufacture of microelectronics devices, including silicon and compound semiconductors. (read more)

Edwards offers a unique range of equipment, support services and technical expertise to meet application needs in the manufacture of microelectronics devices, including silicon and compound semiconductors. (read more)

Clean Air Products' complete line of fume hoods and wet process stations are designed specifically to meet the needs of semiconductor manufacturing operations. With over 20 years of design, manufacturing and service experience, Clean Air Products can supply the complete package tailored to your requirements. (read more)

The MEI Advancer series wet processing system is a highly configurable, semi-automated modular, front to back side mount robotic wet station, suitable for a wide variety of etch, strip and clean steps. Applications include processing for solar cells, IC devices, medical device manufacturing, MEMS and parts cleaning. (read more)

Localized, Self Contained, Low Cost, Drum Chemical Delivery

MEI's DrumChem systems are pumped or pressurized chemical delivery systems for Semiconductor or Solar Wet Processing Systems. Standard systems are designed for front and side access to components. Configured for either one or two 55-gallon drums for acid, base, or solvent systems with internal drum hook-up. (read more)

The MEI Evolution series wet processing systems are in-line, configurable, automated, modular, linear batch immersion wet systems made for high throughput at a low cost. Provides Dry in and dry out batch wafer processing of multiple lots of wafers from 100mm to 300mm. SECS/GEM interface, SEMI S2. (read more)

Extend the Life of your Wet Process Systems, SRDs & Chemical Delivery Systems

MEI extends the usable life of wet processing equipment, from wet systems and dryers, to processes and plumbing. Our wet process system retrofits, reconditioning and upgrade work includes manual wet benches, and semi-automated or fully automated processing equipment, SRDs & chemical delivery syst... (read more)

Remove Organic & Metallic Contamination. Fast, Oxide-free drying in a small footprint.

MEI introduces an automated Polysilicon chunk cleaning system for removal of organic and metallic contamination found on polysilicon. MEI's high throughput wet etch system with good process control and outstanding drying capabilities achieve optimal purity with cool to the touch output. (read more)

Automated Cleaning of Solar Wafers. High Throughput, Dry to Dry, Multi-processing.

The MEI Solar Evolution high throughput wet processing systems are in-line, configurable, automated, modular batch immersion systems made for high throughput at a low cost. They are designed to handle photovoltaic/ solar wafers for many applications. Custom equipment for polysilicon ingot cleaning. (read more)

Meet the Tigress, a front to back automated system that is compact and easy to use for processes that require uniformity without the high price tag. (read more)