JEOL offers the widest range of e-beam tools for mask, reticle, and direct-write lithography, from high volume production to advanced research and development of NIL, photonic crystals, and sub-10 nanometer linewidths. (read more)

The next generation e-Vap Programmable Sweep Controller has taken electron beam sweep capabilities to a higher level in versatility and practicality. It combines years of customer feedback with the latest advances in electronics technology. It possesses profound advancements from its predecessor in ... (read more)

Modular sources are offered in six standard frame sizes and are stand alone components for maximum installation flexibility in existing vacuum systems.

Modular sources are fitted with direct water-cooled crucibles. Select models have indirectly cooled crucibles that allow the user to change cruci... (read more)

Horizontal Source Assemblies place an evaporation source plus all necessary feed through on a single Del-Seal™ CF flange. Also included are clamps, linkages, water flow switch and water connections. The complete system is UHV compatible and mounts on a chamber with an 8-inch or 10-inch horizontal po... (read more)

e-Vap® CVS Series Power Supplies are constructed using state-of-the-art solid state high frequency switching technology. They are offered in three standard models rated for 6kW, 10kW and 15kW. CVS series power supplies are for use with any of the MDC e-Vap® evaporation sources and are also compatibl... (read more)