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MICRO:Archive:Back Issue TOC
Processing Investigating defect mechanisms for a low-volume resist coating recipe with a solvent prewet step. PRODUCT TECHNOLOGY NEWS. Products: Simulation tool set, high-flow turbopump, noncorrosive gears, overlay metrology tool, motorized impeller, cast platen heaters, polypropylene filter...
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MICRO:Product Technology News (July '99)
for rugged operation. Pumps operate from 700 to 3400 L/sec. They accommodate both 200- and 300-mm wafer processes. (Semicon West, San Francisco, South Hall, Booth 1330) The Model 7406 XR oven can be used to cure both air- and heat-cure conformal coatings. The infrared convection heating system...
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MICRO: Product Technology News (April 2001)
focus-exposure. A high-flow maglev turbopump has a small design for semiconductor processes. The ATH1600 provides reliable vacuum performance. The pump is suitable for metal etch, dielectric etch, interconnect etch, ion implantation, sputtering, and plasma-enhanced chemical vapor deposition...
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MICRO: 2001 Back Issues
processor, thin, film-on-quartz heater, metal etch trap, deep-UV laser ablation system, specialty-gas heating system, 300-mm wafer-handling system, deep-UV spectrophotometer, fabwide monitoring system, electroplaing monitor, corrisive-liquid flow sensors, defect inspection tool, metal-sealed flange...
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MICRO:Top 40 Product Allstars page 2 (Nov/Dec '98)
, and leveler. Quartz Acid Heater Trebor International West Jordan, UT The ultrapure-quartz flow path of the IQ acid heater has no O-rings or other potential particle traps. A proprietary fused resistive element transfers heat at an efficiency rate of 99% and handles temperatures 180 C...
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MICRO:Archives of 1997 Back Issues
Big changes needed to satisfy cleanroom, boardroom, exec says Show's explosive growth mirrors IC industry expansion on island MEMC chooses McCarthy for 300-mm line; Air Products, BOC split bill on new plant; ASML to more AZ site; Parker Alabama facility opens Planar chooses YieldUP; ASML sells...
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Product Technology News
, PA The CleanTrac Ultra-Clean ionization bar uses clean dry air or dry nitrogen to minimize accumulation of contaminants in the emitters. Designed for Class 1 use, the bar can be installed in minienvironments and laminar-flow benches. Six lengths from 1 to 6 ft are available. A detachable 7-ft...
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Introduction to Load Cells
easy installation. Used frequently in weighing research and in-line force monitoring. ^top. Anemometers | Automation | Accelerometers | Calibrators | Cartridge Heaters | Chart Recorders | Cryogenics | Custom Pressure Transducers | Data Loggers | Data Acquisition | Dial Thermometers | Fiber Optics...