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  • MICRO:
    and students. the 40 most popular products of 2000, including wafer shipping boxes, transport robots, lithography tools, copper-cleaning products, mass-flow controllers, wafer dryers, copper-stripping systems, and an array of valves, regulators, sensors, pumps, and detectors. Silicon Valley plugs
  • MICRO: Products
    continuous-motion stage, which uses air bearings in vacuum, reducing vibration levels. The OD optical displacement sensor is a sensing and measuring system in one package. The OD performs ultraprecise measurements and detects the presence of even very small objects. The instrument works on the principle
  • MICRO: Archive: Back Issue TOC
    E-manufacturing: Interface A deployment, automated decision-making tools essential for full fab automation Advancing real-time DRIE silicon trench etch-depth monitoring in MEMS applications Photomask repair system, gas-flow calibrator, ion implanter, electron probe microanalyzer, thin-film
  • Application Advantages of LBA Differential Pressure Sensors Due to Their Very High Pneumatic Impedance
    Sensortechnics' LBA differential pressure sensors measure ultra low air or gas pressures from 25 Pa (0.1 inH2O) full scale. The sensors are based on a new and innovative MEMS technology which integrates a micro flow channel within the silicon sensor chip. At the same time the sensors use the proven
  • General Information for TGS Sensors
    to the adsorbed oxygen, resulting in leaving positive charges in a space charge layer. Thus, surface potential is formed to serve as a potential barrier against electron flow (Figure 1). Inside the sensor, electric current flows through the conjunction parts (grain boundary) of SnO2 micro crystals. At grain

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