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  • General Information for TGS Sensors
    to the adsorbed oxygen, resulting in leaving positive charges in a space charge layer. Thus, surface potential is formed to serve as a potential barrier against electron flow (Figure 1). Inside the sensor, electric current flows through the conjunction parts (grain boundary) of SnO2 micro crystals. At grain
  • Technical Article: Traditional Mass Flow Meters
    Typically traditional mass flow sensors are hot wire sensors that operate on the heat loss principle and designed for general flow applications (e.g continuous pipe flow). ATC's micro-flow sensors, like the IGLS, are used for leak testing. They are designed for leak testing, where air flows
  • MICRO:
    and students. the 40 most popular products of 2000, including wafer shipping boxes, transport robots, lithography tools, copper-cleaning products, mass-flow controllers, wafer dryers, copper-stripping systems, and an array of valves, regulators, sensors, pumps, and detectors. Silicon Valley plugs
  • Application Advantages of LBA Differential Pressure Sensors Due to Their Very High Pneumatic Impedance
    Sensortechnics' LBA differential pressure sensors measure ultra low air or gas pressures from 25 Pa (0.1 inH2O) full scale. The sensors are based on a new and innovative MEMS technology which integrates a micro flow channel within the silicon sensor chip. At the same time the sensors use the proven
  • MICRO: Products
    continuous-motion stage, which uses air bearings in vacuum, reducing vibration levels. The OD optical displacement sensor is a sensing and measuring system in one package. The OD performs ultraprecise measurements and detects the presence of even very small objects. The instrument works on the principle
  • MICRO: Product Technology News
    A supercompact cleanroom roll-up door is suitable for research and process settings. Offering high levels of cleanliness, air control, and sealing to limit leak flow, the door has advantages over swinging doors, sliding doors, and strip curtains. Maximum door size is 18 18 ft. The unit's fast
  • MICRO: Archive: Back Issue TOC
    E-manufacturing: Interface A deployment, automated decision-making tools essential for full fab automation Advancing real-time DRIE silicon trench etch-depth monitoring in MEMS applications Photomask repair system, gas-flow calibrator, ion implanter, electron probe microanalyzer, thin-film
  • MICRO:Top 40 (Nov '00)
    The readers have spoken! You have chosen the 40 most popular products of 2000, selected from the Product Technology News sections of This year's Top 40 All-Stars include semiconductor manufacturing components and tools such as mass-flow controllers, fab automation units, CMP systems, copper-related

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