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Post-CMP Polyvinyl Alcohol Brush Testing
Polyvinyl alcohol (PVA) brushes are used in the semiconductor process during the post-CMP cleaning stage. Different PVA brush designs can affect wafer cleaning efficiency. Ensuring proper brush-to-wafer contact pressure and contact area is crucial in achieving clean and particle free wafers...
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MICRO: Wet Surface Technologies
Technologies (Boise, ID) has developed an immersion-based process system that incorporates an isopropyl alcohol (IPA) vapor condensation drying technology. Another significant feature of the tool is its use of three megasonic transducers. This article describes the system and presents performance data...
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MICRO: Wet Surface Technologies
technologies are shorter process times, which result in higher process equipment throughput; residue removal efficiency at lower process temperatures; and a reduction in environmental concerns and disposal costs. However, a process of record has not been established, particularly in copper/low-k...
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Exhausting Process Dust: Grain Processing Corp., Muscatine, IA
flow impeller technology. This technology, applied to Grain Processing Corp. uses mixed flow impeller technology to manage process dust-and laboratory workstation fume hood exhaust roof exhaust systems, is widely used at research laboratories to handle workstation fume hood exhaust emissions. Mixed...
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The Candidates and Technology
. He would also apply higher efficiency standards to new building leased by the government and retrofit older buildings to save money and move the construction industry toward green technologies. He also wants to simplify the process of upgrading the national electric grid. Space program. Paul: (From...
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Improving Control of the Extrusion Spheronization Process
. The physical properties of two types of commercial MCC showed differences during the step of moistening, thereby affecting the particle size and hardness of the pellets obtained The most commonly used granulating liquid is water, although in some cases the use of alcohol or a water-alcohol mixture...
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MICRO: Wet Surface Technology
Angeles, CA 90064. 310.445.3700. Wet Surface Technology. Implementing a fully integrated IPA drying process in the fab environment. John J. Rosato, M. Rao Yalamanchili, Evanson G. Baiya, and Dwight J. Hanson, SCP Global Technologies; and Gerhard Eilmsteiner and Andreas Petritsch, austriamicrosystem...
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MICRO: Product Technology News
solvents, solvents, and other chemistries, and possess a sealed nitrogen-purged process environment. A rapid solvent-to-rinse transition eliminates corrosion and the need for an isopropyl alcohol intermediate rinse. The small-footprint units are available fully automated for 200- and 300-mm...
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MICRO:Cleanroom Technologies, by Roger Welker, p.61 (Sept '99)
was used as the LPC blank. Then the gloves were turned inside out, which happens naturally when operators remove gloves worn during the manufacturing process. The inverted gloves were filled with the remaining 300 ml of detergent-and-water solution from the beaker, sealed with a twist tie...
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Evaluating chemical mechanical cleaning technology for post-CMP applications
to as DSS. While the scrubbing process is well documented, advances in CMP technology and tighter defect specifications place an ever-increasing burden on the cleaning step. The capabilities of any post-CMP clean must evolve to stay effective. An example of this evolution is the addition of more...