Products & Services

See also: Categories | Featured Products | Technical Articles | More Information
Page: 1

Conduct Research Top

  • MICRO: Characterizing an electrochemical oxygen sensor for process gas monitoring applications
    wafers. The presence of even very low parts-per-billion levels of oxygen in such semiconductor process gases as nitrogen, argon, and helium can adversely affect both manufacturing yields and device quality. For example, oxygen can react with silicon during processing, forming undesirable oxides
  • MICRO: Taking Control
    that Achilles' heel. As detailed in this article, that research involved the novel use of residual gas analyzer (RGA) measurement methods coupled with very close tool/sensor integration, key-number data compression to deal with a small tsunami of raw data resulting from effective sensor integration

More Information Top

Lock Indicates content that may require registration and/or purchase. Powered by IHS Goldfire