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  • MICRO: Characterizing an electrochemical oxygen sensor for process gas monitoring applications
    to commissioning. However, during routine fab operations, an inadvertent error by a process tool operator or the failure of a delivery system component such as a valve or pressure regulator can cause gas contamination, which, if not detected in a timely manner, can result in a significant amount of scrapped
  • Mechnical Vacuum Pump Selection Considerations for Ion Pressure Nitriding, Plasma Nitriding and Nitro Carborising (.pdf)
    of the dilution and removal of this explosive gas is needed for the vacuum pump system. In the plasma process there is the additional consideration of using nitrogen, argon and in particular water, which presents significant challenges to the safe and reliable operation of the vacuum pump system. This paper
  • Primary Vacuum Pumping in Mass Spectrometry Systems (.pdf)
    of. Pirani. from 1 to 3 mbar. The target gases typ-. Dry-pump. gauge. ically are nitrogen, argon, helium, and. under test. Exhaust. hydrogen, for example in LC–MS and. Exhaust. Rotary vane pump. ICP-MS. The target ultimate pressure. Turbomolecular. (base pressure) is <0.1 mbar. The. equivalent throughput
  • Medical Device Link .
    Laser Drills Critical Holes in Blood-Gas Sensor Micromachining technology enables effective processing of acrylic optical fibers. A multiparameter blood-gas monitor system combines fiber optics with specific chemical probes to directly measure blood chemistry and blood gases. The key component
  • Micro Fluidic Flow and Pressure
    valves, electronic circuitry, three-way valve). footprint. Additional modules with. argon. Furthermore, the dynamic. this footprint, necessary for the real-. behavior of each of the instruments. ization of miniature flow pressure. was measured by performing vari-. control systems, are: I. ous set
  • Application Note: Inductively Coupled Plasma Spectroscopy (.pdf)
    field is activated which results in the formation of the plasma. Sample is introduced to the plasma through the carrier gas which is commonly Argon. Light emitted by elements in the sample can be detected and used to determine concentrations of unknowns in the sample. ICP Sample Preparation
  • Vacuum Requirements for Steel Degassing (.pdf)
    for hydrogen. Soft purging with argon at the end of the process can also. reduce residual oxygen levels to below 15ppm. For VD, gas flows of many tens of kg/h air equivalent must be handled at 0.67mbar. This puts the pumping speed capacities required into the tens of thousands of m3/h as. a minimum
  • Medical Device Link .
    there to the part. Others may present some of the most perplexing problems imaginable. Filler can settle out of suspension, requiring the material to be stirred or agitated before and after it is removed from the container. Protection of the material with an inert gas such as nitrogen or argon to prevent