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  • Gun Hard Inertial Measurement Unit Based on MEMS Capacitive Accelerometer and Rate Sensor (.pdf)
    stability of the sensors. Colibrys has successfully developed a gun hard version of its accelerometer product and AIS has integrated these acceleration sensors and rate gyro to a gun hard IMU. Microsoft Word - AIS article PLANS 08 modified.doc. Gun Hard Inertial Measurement Unit based on. MEMS capacitive
  • MEMS Pressure Sensors - Pressure Measurement Types
    . The measurement technique can involve capacitive or resistive (piezoresistive or pressure sensitive resistors). Piezoresistive designs are shown in Figure 1. Vacuum is a negative gauge pressure or a value below atmospheric pressure. When specifying or discussing the type of pressure measurement
  • MEMS Motion Sensors, the Solution for Harsh Environments in Defence Applications
    . There are two ways to. design to meet the performance with. operate a Capacitive MEMS sensor. For. manageable manufacturing tolerances. the open loop approach, the mechanical. 3. 1 2
  • Characterizing a rapid thermal annealing process to improve sensor yield
    . In the acceleration sensor manufactured by Motorola's MEMS-1 die manufacturing group, three polysilicon plates are fabricated parallel to one another to form a dual, differential capacitive element (see Figure 1). The top and bottom plates are stationary, while the middle plate can move in the direction
  • Measure Tilt Using PIC16F84A & ADXL202
    . output of the sensor to a digital format such as duty. capacitive. Each of these sensors has distinct charac-. cycle. This method not only lifts the burden of designing. teristics in the output signal of the sensor, cost to. fairly complex analog circuitry for the sensor but also. develop, and type
  • MEMS based seismic and vibration sensorsin Building& Structural Health Monitoring systems
    loop capacitive MEMs based. Available Market’. To this extent sensor suppliers are. sensors deriving their functional performance from. driven to adopting the most challenging of parameters. developments in the automotive and more recently. within a specification as the new ‘standard
  • MICRO: Special Apps
    . The accelerometer sensor is a single layer of suspended structural polysilicon, from which a movable proof mass and fixed interdigitated fingers for capacitive sensing are formed. The proof mass moves in the sensing axis in response to an acceleration, causing a change in distance between
  • MEMS accelerometers and the Energy market
    . The basic structure of the acceleration detector is constituted. vibration measurements. of a proof mass with a surface of few mm and a thickness of few. 2. hundreds microns, attached by a silicon spring to a frame and. MEMS technology for capacitive accelerometers. separated from the detection plates