Carbon Dioxide Laser Web Processing Systems

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• Laser Drilling Tablets for Use in Osmotic and Other Novel Drug Delivery Systems
  By Frank Gaebler, Coherent, and Graham Coffee, Control Micro Systems The organic materials used in drug delivery systems nearly all display strong absorption in the infrared, so a carbon dioxide (CO ) laser, with nominal output at a wavelength of 10.6 um, is well matched for this task. In contrast...
• University of Waterloo Skip to the content of the web site.
  research in the physics department specializes in the applications of powerful industrial lasers that can produce high intensity beams and can cut or weld metals such as steel at speeds of more than six metres per minute. The most important of these is the carbon dioxide laser that operates...
• MICRO: Tech Emergent
  of such materials is that they are mechanically weak and therefore do not withstand the stresses of postdeposition processing steps as well as silicon dioxide does. Problems are most likely to arise during chemical-mechanical polishing (CMP) of copper and during packaging of the finished chips. The materials' low...
• MICRO: Expansions and Acquisitions
  2001, will have a fab-like layout and house minienvironments for contamination control, Ashland says. The building will feature Class 100 areas for final carbon dioxide based cleaning and packing. The Carrollton site joins a roster of other Ashland service facilities in Tempe, AZ, and Austin, TX...
• MICRO:Product Technology News (Sept. '98 p.60)
  , the Middle East, and Africa. Tonkaflo pumps are high-pressure, centrifugal pumps for RO systems. Information: 612/933-2277. Scott Semiconductor Gases has introduced a method for delivering high-purity carbon dioxide. The vendor's Continupure system supplies a special type of CO2 called Precision...
• MICRO:Product Technology News (March 2001)
  heated lines to the scrubber, lowering the cost of ownership. A deep-UV laser ablation system improves the ablation of all inductively coupled plasma optical emission spectroscopy (ICP-OES) and inductively coupled plasma mass spectroscopy (ICP-MS) materials. The UP-213 produces a fine-particle...
• MICRO:Product Technology News (Oct. '98, p.110)
  characterizes ultrathin films and film stacks at a thickness accuracy of +-0.5 A. Tool-to-tool matching throughout the fab is +-0.1 A for films 100 A thick. The system incorporates a proprietary ellipsometer that combines multiple angle of incidence data acquisition and multiple laser wavelengths to measure...
• New Methods for the PAT Toolbox
  ugly stepchild," says Andrew Malcolmson, director of business development at Malvern Process Systems (Southborough, Mass.). As a developer of particle size measurement equipment, Malvern has offered in-line laser diffraction analyzers for thirteen years, with more than 400 installations worldwide...
• MICRO:Archives of 1998 Issues
  in a cost-effective way PRODUCT TECHNOLOGY NEWS Products: 300-mm wafer robots, 300-mm ion implanters, vacuum pump, copper control system, air valves, liquid carbon dioxide cleaner, pod door opener, 300-mm wafer stage, CMP particle size analyzer, pure water monitor, spectrometer, fan filter system, white...
• MICRO:Outlook 2000 (Nov '99)
  . It is difficult to resolve the features, much less classify them. It's a tall order to do that. Then given the copper technology on the horizon, or in some cases actually out the door, like at IBM and Motorola, copper planarization and dual damascene processing is going to become the mainstream...

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