Chamber UV Module

Conduct Research

• Controlling corrosion, particles in metal etch-and-strip cluster tool systems
  the potential for device damage to thin gate oxides (<60 A). In addition, a baffle located between the plasma and wafer blocks UV radiation from the microwave source to prevent device damage, and it diffuses species evenly over the wafer surface. The reactants' composition is well established by the emission...
• INDUSTRY NEWS
  with the University of Texas at Dallas to develop a high-density plasma source for 0.18-um etching. The university has a patent pending on the source, which Beta Squared plans to introduce on its cluster tool platform by the end of 1997. SVG sells 25 steppers Silicon Valley Group has sold 25 deep-UV step...
• MICRO:Product Technology News (Oct. '98, p.110)
  and a pressure-relief valve. Clamped to the base with a large O-ring, the chamber has two quick-disconnect fittings for filling and purging. The chamber is made of low-outgassing transparent molded poly- urethane which blocks UV light at a rate of 2% below 250 nm. The filter in the nitrogen input line is rated...
• MICRO:Product Technology News (Jan '2000)
  An automated deep-UV spectrophotometer measures samples of thin-film coatings, photoresists, silicon wafers, deep-UV optics, dry fused silica, and calcium fluoride under vacuum or purged conditions. The CAMS-507 DUV provides precise, repeatable reflectance, absorption, and transmission measurements...
• MICRO:January 1998:Product Technology News
  optical intensity, and a throughput of 80 wafers/hr. Using individual lasers at 458, 633, 780, and 905 nm, the system provides broad spectral coverage and a deep-UV reflectometer to characterize both thick and thin films in CMP, CVD, diffusion, etch, and lithography applications. The laser light...
• Product Technology News
  ceiling module, or as an air supply module for a minienvironment. The lightweight hood incorporates an acoustically decoupled fan with stepless variable solid-state speed control. The low-profile filter is sealed with a dielectric gel. The Prometrix UV-1280SE thin-film measurement system combines...
• MICRO: Product Extra!
  between two different experiments or between separate processes. The module features a large-format design with a 50 x 50-mm clear aperture that allows passage of a large-diameter homogenized beam without beam corner clipping. A vacuum UV system, it can be used with short-wavelength UV excimer beams...
• MICRO: Products
  industry. The piping's stainless-steel shell resists exterior corrosion, UV effects, and weathering. It also protects high-purity lines from mechanical and seismic damage. It is available with diameter sizes of 1/2 to 12 in. (Semicon Southwest, Booth 1737). Deposition Technology. ASM. Phoenix, AZ...
• MICRO: Products
  for dark-field imaging at smaller technology nodes. The tool uses short-pulsed UV illumination and a large 2-D focal plane assembly (FPA) to create die-sized images. The FPA enables a large field of view, improving throughput and reducing overhead. The UV illumination source also enables high optical...
• Treating Higher Strength Commercial Sewage For Disposal Or Re-use
  , and 50-67% recirculation to the septic tank inlet. For on-site subsurface disposal, a shallow, thin Area Bed made of medium-fine sand is preferred for optimum fecal removal. For irrigation re-use, UV disinfection is added for irrigation re-use, and multi-media filtration plus ozone + chlorine are added...

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