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Chemical Mechanical Planarization Compound

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  • INDUSTRY NEWS
    ., Pittsburgh, PA 15237; 412/367-3012; fax, 412/367-4373. IPEC, MEMC eye CMP deal MEMC Electronic Materials will use chemical-mechanical planarization tools from IPEC in a proposed joint program to develop ultraflat silicon wafers for advanced chip processes. In the program's initial phase MEMC...
  • INDUSTRY NEWS
    Lam Research has entered the fastest growing segment of the global chip equipment market by signing a definitive agreement to purchase OnTrak Systems, the world's leading supplier of chemical-mechanical planarization cleaning systems, for $225 million. Announced on March 24 and already approved...
  • MICRO: Products
    . A monitoring device for chemical-mechanical planarization applications provides rapid insight into the pressures applied during the polishing process and supplies data directly to personal computers. The easy-to-use I-Scan system measures the tactile force and pressure applied by a polishing head...
  • MICRO: Wet Surface Technologies
    Todd Buley, Yakov Epshteyn, and Mike Kulus, Rohm and Haas Electronic Materials CMP Technologies ; and Cuong Tran, Kyle Bartosh, Darryl Peters, and Chris Watts, The effectiveness of the copper chemical-mechanical planarization (CMP) process can be improved by establishing an efficient and complete...
  • MICRO: Technical Viewpoint
    Karey Holland, Ann Hurst, and Harvey Pinder Technologists and scientists working on chemical-mechanical planarization (CMP) have improved the technology's cost of ownership (COO) since it was first introduced into semiconductor chip manufacturing in the late 1980s. In conjunction with enhancements...
  • Using surfactants in iron-based CMP slurries to minimize residual particles
    During recent years, the use of chemical-mechanical planarization (CMP) to remove excess coating material from wafer surfaces has increased dramatically, as has the literature on CMP research. Basically, the CMP process involves polishing wafers using a slurry that combines a chemical component...
  • MICRO:Industry News:Lead Story (Oct '99)
    on not inducing mechanical stresses on the low-k itself," says Michael West, SEZ's business and strategic technology director. "Allied was given the task of coming up with a turnkey application where its low-k porous material could be subsequently planarized or etched back and not damage that spongelike...
  • MICRO:Top 40 (Nov '00)
    . The 25-capacity, reduced-pitch box complies with I300I requirements, featuring a design that limits the amount of system material that comes in contact with each wafer. Wafer manufacturers can use the FOSB as many as four times before returning it to the company for recycling. A chemical-mechanical...
  • MICRO:Top 40 (Nov '00)
    , featuring a design that limits the amount of system material that comes in contact with each wafer. Wafer manufacturers can use the FOSB as many as four times before returning it to the company for recycling. CMP System. SpeedFam-IPEC. Chandler, AZ. A chemical-mechanical planarization (CMP) system...
  • MICRO:Building Copperopolis (Jan '99)
    chemical-mechanical planarization (CMP) of dual-damascene copper structures therefore will require highly efficient removal of both the copper and barrier layers. But achieving this goal is a challenge because the barrier materials are typically more difficult than copper to planarize using standard polishing...

Engineering Web Search: Chemical Mechanical Planarization Compound

Semiconductor device fabrication - Wikipedia, the free...
Chemical-mechanical planarization (CMP) is also a removal process used between levels.
Surface finishing - Wikipedia, the free encyclopedia
Chemical-mechanical planarization (CMP)
» Publications
Luo, J. F., and Dornfeld, D., ?Optimization of Chemical-Mechanical Planarization (CMP) from the Viewpoint of Consumable Effects,? 2001 Proceedings of
See Laboratory for Manufacturing and Sustainability Information
Optimizing polysilicon thin-film transistor performance with...
Optimizing polysilicon thin-film transistor performance with chemical-mechanical polishing and hydrogenation
Self-aligned nanostructures by CMOS technology
Such techniques include a combination of advance lithography and etching, chemical mechanical planarization (CMP), or metal lift-off.
Simultaneous (e.g., chemical-mechanical polishing, etc.)...
Simultaneous (e.g., chemical-mechanical polishing, etc.) 438691000 - Combined mechanical and chemical material removal
Substrate polishing method, semiconductor device and...

JEM Abstracts: October 1996
Proceedings of the symposium on Engineering Science of Chemical-Mechanical Planarization and Regular Issue Papers from the 1996 TMS Annual Meeting,
See Minerals, Metals & Materials Society (The) Information
New products for semiconductor applications unveiled
manufacturing industry, a new line of chemical mechanical planarization (CMP) gaskets and membranes together with a perfluoroelastomer compound.
Electronics & Communications | The Dow Chemical Company
CUSâ?¢ 1300 slurries Barrier slurries for copper chemical mechanical planarization (CMP)
See Dow Chemical Company (The) Information

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