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  • Advanced Reactor System for the Fine Control of Properties of Molybdenum Powder
    nucleation of product phase and product phase crystal growth via chemical vapor transport. Volatile molybdenum oxide monohydrate, MoO2(OH)2, is the gas phase re-sponsible for the chemical vapor transport of Mo. Complete reduction system was designed and engineered based on this pilot development work
  • Examining scale-up and computer simulation in tool design for 300-mm wafer processing
    , government laboratories, and commercial vendors. The virtual reactor concept is close to becoming a reality. The transition from 200- to 300-mm wafer processing tools presents a clear problem in scale-up. Chemical engineers have had years of experience in scaling up chemical reactors from laboratory to pilot
  • Moving Beyond the Batch
    By Bill Swichtenberg, Senior Editor Phoenix Chemicals Proctor thinks it is important to consider the entire process as a candidate for continuous processing (much as Novartis-MIT is doing) and not just the reaction stage. For example, many chemical processes rely on a liquid-liquid extraction
  • Moving Beyond the Batch
    and flow reactor technology is a strategy for achieving improved efficiency. It delivers lower raw material and waste costs; it reduces environmental emissions and energy consumption, as well as overall unit operations and operational costs. In addition, FDA has championed process analytical technology
  • MICRO: Green and Clean
    and Joseph Van Gompel and Peter Mawle, An exhaust management system developed to meet the industry's GWP emissions targets provides cost and time savings and can lower 300-mm tool footprint requirements below those of 200-mm fabs. educing their fabs' emission of global-warming perfluorocarbons
  • MICRO: Green and Clean
    Ara Philipossian and Erin Mitchell, Department of Chemical and Environmental Engineering, University of Arizona A study investigates the fluid dynamics and inherent tribological aspects of the CMP process in order to develop robust planarization processes with significantly lower slurry consumption

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