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Booths 120, 121) An extension of the Infinity line of diamond CMP pad conditioners, the Infinity v6.1 disk offers the highest-strength synthetic diamond. The conditioner's diamond concentration has been optimized to achieve a bond strength improvement of more than 80% and a disk life improvement...

...planarization (CMP) has become the process of choice. In a damascene process, instead of depositing metal and then etching back the dielectric, the dielectric is patterned before the metal is deposited as a film, filling the openings in the dielectric. The film is then polished using a CMP slurry...

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