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...was key to their success and it turned out to be the biggest challenge of the entire project. It took a team effort on the part of BD and suppliers, Creative Metal Products (CMP; San Jose, CA) and Small Precision Tools (SPT; Petaluma, CA) to develop the solution. To understand the situation BD faced...

...and control (PDC) group and state-of-the-art electrical characterization tools. A lithography cell occupies nearby Building 89, which is a converted office space. An ASML 5500/90 DUV stepper and DNS 80B track are the main occupants, with a wafer particle inspection tool, an overlay registration...

...optics. The technology suppresses color variation and grainy background noise, increases small-particle sensitivity, and provides surface selectivity. This last capability minimizes the detection of previous-layer defects. The tool is particularly suitable for monitoring CMP and etch processes...

Magma panelists explore whether DFM is the real deal After much bravado, EDA vendors like Magma Design Automation and Mentor Graphics are starting to deliver viable "DFM " tools or DFM-savvy tools. But will they be able to shield IC designers from having to deal with problems that occur...

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