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CO2 Laser Heat Treatment Equipments

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    for tungsten plug and aluminum fill as well as advanced Ta(N)/Cu barrier/seed processes for copper interconnects. The source provides uniform bottom coverage of high-aspect-ratio devices without the use of a collimator. (Semicon West, Yerba Buena Center) Laser thermal processing technology combines...
  • Keeping Metal Machines And The Environment Clean
    their critical pressure and temperature. In the case of CO2, for example, the critical temperature is 31.1°C and the critical pressure is 73.9 atm. Such pressures require costly equipment and this method needs more development before it is practical. Other methods include plasma and laser cleaning, which...

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