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CO2 Laser Tube Processing Production Tool

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  • Product Extra!
    imaging and thermal processing in a single system for advanced contact and junction formation on devices with linewidths 0.18 um. The patterned laser doping tool reduces production costs by eliminating the need for the masking layers common to conventional implant layers. The laser process also helps...
  • MICRO:July/August 98:Product Technology News
    uniformity. The system is suitable for use with postdielectric deposition anneals, selective oxidation, and low-temperature metal anneals in the production of submicron devices. Offering both catalytic and pyrogenic processing capabilities, the tool has a ramp rate of >200 C/sec. A small footprint...
  • MICRO:Product Technology News (Oct '99)
    and repeatability of measurements. An image-processing algorithm accommodates variations in the verification target and accepts or rejects targets. The tool's FSF focus system locates the focal plane independently of thin-film effects. A laser keeps the microscope in focus as the stage moves across a field...

Engineering Web Search: CO2 Laser Tube Processing Production Tool

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