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CO2 Laser Web Processing Equipment

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  • Product Extra!
    for tungsten plug and aluminum fill as well as advanced Ta(N)/Cu barrier/seed processes for copper interconnects. The source provides uniform bottom coverage of high-aspect-ratio devices without the use of a collimator. (Semicon West, Yerba Buena Center) Laser thermal processing technology combines...
  • MICRO:Product Technology News (Sept. '98 p.60)
    to 850 psi and at temperatures of 40 to 70 F. The system footprint measures 8 x 8 ft. Temperature Controllers Noah Precision San Jose, CA Designed for use with wafer processing equipment, three point-of-use systems stabilize the temperature on the wafer to within a narrow range to enhance...
  • Polyimide 1, designers 0
    was proportional to how much radiation the sensor saw. Once the signal is zeroed, or read out, TLD phosphors can be used again. Traditional ways of heating such phosphors include heated metal planchets or hot gas. Our method, however, employed a 15-W CO2 laser which sped up the heating process and let us design...
  • MICRO: Product Technology News
    temperature. Designed with Bluetooth RF technology for wireless communications, the tool transmits thermal data instantaneously to Thermal MAP software, allowing users to better understand wafer processing environments and characteristics. (Semicon West, S.F., South Hall, Booth 2109). CO2...
  • MICRO: E&A&A
    . In related news, Sematech and Exitech will develop the first ultra-high-NA 193-nm immersion microexposure tool, the MS-193i. The system, which will incorporate a catadioptric lens from Corning Tropel and an ArF laser source from Lambda Physik, will be installed at the consortium in 3Q 2005...
  • MICRO:Product Technology News (Oct '99)
    and repeatability of measurements. An image-processing algorithm accommodates variations in the verification target and accepts or rejects targets. The tool's FSF focus system locates the focal plane independently of thin-film effects. A laser keeps the microscope in focus as the stage moves across a field...
  • MICRO: Products
    single-wafer chamber that enables the development and evaluation of technologies for deposition, cleaning, conditioning, and lithography applications using supercritical CO2. The vacuum-compatible system can be integrated with vacuum-based processes on a single cluster tool. Supercritical CO2 processing...
  • MICRO:July/August 98:Product Technology News
    uniformity. The system is suitable for use with postdielectric deposition anneals, selective oxidation, and low-temperature metal anneals in the production of submicron devices. Offering both catalytic and pyrogenic processing capabilities, the tool has a ramp rate of >200 C/sec. A small footprint...
  • MICRO:Semicon Southwest '98 - Technical/Business Programs (Oct. '98, p.127)
    , Hewlett-Packard GmbH, PRCO Accompanying Quality Assurance for High Level Processing of Advanced Packages Klaus Feldmann and Robert Feuerstein, University Erlangen Analysis and Application of Vibration Behavior for Wire-Bonding Capillary by Transmission Laser Vibrometer Yoshinari Tamura, Yuichi Miyahara...
  • MICRO:Industry News:Lead (April '99)
    . Festa says the 25-second claim is based on a comparison "with what he knows" of other green dry cleaning technologies, such as the Radiance Process, which uses either a deep-UV excimer, an Nd:YAG, or a CO2 laser and an inert gas flow to mechanically remove the contaminants dislodged by the laser...

Engineering Web Search: CO2 Laser Web Processing Equipment

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