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CO2 Laser Web Processing Machine

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    for tungsten plug and aluminum fill as well as advanced Ta(N)/Cu barrier/seed processes for copper interconnects. The source provides uniform bottom coverage of high-aspect-ratio devices without the use of a collimator. (Semicon West, Yerba Buena Center) Laser thermal processing technology combines...
  • MICRO: Product Technology News
    temperature. Designed with Bluetooth RF technology for wireless communications, the tool transmits thermal data instantaneously to Thermal MAP software, allowing users to better understand wafer processing environments and characteristics. (Semicon West, S.F., South Hall, Booth 2109). CO2...
  • Polyimide 1, designers 0
    was proportional to how much radiation the sensor saw. Once the signal is zeroed, or read out, TLD phosphors can be used again. Traditional ways of heating such phosphors include heated metal planchets or hot gas. Our method, however, employed a 15-W CO2 laser which sped up the heating process and let us design...

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Telesis' line of Nd:YAG, fiber, CO2, and diode-pumped lasers offer the ultimate in high-speed, high-quality product identification processing.

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