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CO2 Laser Web Processing Production Tools

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  • Product Extra!
    imaging and thermal processing in a single system for advanced contact and junction formation on devices with linewidths 0.18 um. The patterned laser doping tool reduces production costs by eliminating the need for the masking layers common to conventional implant layers. The laser process also helps...
  • MICRO: Products
    single-wafer chamber that enables the development and evaluation of technologies for deposition, cleaning, conditioning, and lithography applications using supercritical CO2. The vacuum-compatible system can be integrated with vacuum-based processes on a single cluster tool. Supercritical CO2 processing...
  • MICRO:July/August 98:Product Technology News
    uniformity. The system is suitable for use with postdielectric deposition anneals, selective oxidation, and low-temperature metal anneals in the production of submicron devices. Offering both catalytic and pyrogenic processing capabilities, the tool has a ramp rate of >200 C/sec. A small footprint...
  • MICRO: E&A&A
    . In related news, Sematech and Exitech will develop the first ultra-high-NA 193-nm immersion microexposure tool, the MS-193i. The system, which will incorporate a catadioptric lens from Corning Tropel and an ArF laser source from Lambda Physik, will be installed at the consortium in 3Q 2005...
  • MICRO:Product Technology News (Sept. '98 p.60)
    SuperMechatronics OEM automation robots ensure particle-free operation for handling 300-mm wafers. The cleanroom and vacuum robots are available in 2-, 3-, 4-, and 5-axis configurations. Incorporating high-speed ac servo technology, the robots can be integrated with vision or laser sensing packages...
  • MICRO: Product Technology News
    temperature. Designed with Bluetooth RF technology for wireless communications, the tool transmits thermal data instantaneously to Thermal MAP software, allowing users to better understand wafer processing environments and characteristics. (Semicon West, S.F., South Hall, Booth 2109). CO2...
  • MICRO:Top 30 (November/December 2001)
    parallelism suited to high-tilt implants. A multitasking control feature facilitates editing of recipes, access to data, and communication with factory host systems without any impact on the production environment. CMP Unit. Peter Wolters. Rendsburg, Germany. A CMP unit for 300-mm wafer processing...
  • MICRO:Product Technology News (Oct '99)
    and repeatability of measurements. An image-processing algorithm accommodates variations in the verification target and accepts or rejects targets. The tool's FSF focus system locates the focal plane independently of thin-film effects. A laser keeps the microscope in focus as the stage moves across a field...
  • MICRO:Semicon Southwest '98 - Technical/Business Programs (Oct. '98, p.127)
    , Hewlett-Packard GmbH, PRCO Accompanying Quality Assurance for High Level Processing of Advanced Packages Klaus Feldmann and Robert Feuerstein, University Erlangen Analysis and Application of Vibration Behavior for Wire-Bonding Capillary by Transmission Laser Vibrometer Yoshinari Tamura, Yuichi Miyahara...

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