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-copper metal deposition chambers, a preclean chamber, and two degas chambers. Each of these chambers had active residual gas analysis (RGA) sensors, and the preclean chamber also had a particle monitor. After performing a series of wafer runs to characterize the system, the engineers had a picture...

...containers and scale. If you are using vacuum degassing or pressure casting equipment, there are some general guidelines to follow. In order to effectively degas liquid materials, your vacuum chamber must be capable of pulling a minimum of 29.6 inHg. If curing your materials inside a pressure chamber...

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