Dielectric Dryer

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• Product Technology News
  ceiling module, or as an air supply module for a minienvironment. The lightweight hood incorporates an acoustically decoupled fan with stepless variable solid-state speed control. The low-profile filter is sealed with a dielectric gel. The Prometrix UV-1280SE thin-film measurement system combines...
• MICRO:Product Technology News (July '99)
  photoresist removal. This option provides closed-loop temperature control that can speed process steps for increased throughput. (Semicon West, San Francisco, South Hall, Booth 1316) Designed for low-k dielectric and CVD processes, Mag-Lev compound molecular pumps use optimal hydrogen and argon pumping speeds...
• Pressure-Sensitive Adhesives Make Strong Joints at Low Cost
  cold and to low-surface energy (LSE) substrates; maintain adhesion at temperatures above 500°F; resist outgassing; resist dielectric breakdown; act as a thermal conductor or insulator; and survive the strict requirements for loss of coolant accidents in nuclear reactors. But OEMs and design engineers...
• MICRO: Product Tech News
  the entire range of measurement requirements for each process, can be used for lithography, CVD, copper CMP, dielectric CMP, polysilicon etch, and dielectric etch applications. The tool features polarized, normal-incidence spectroscopic ellipsometry for noncontact OCD measurements in the 320-780-nm...
• Polymer Coatings
  surface with low friction, high corrosion resistance, and dielectric properties superior to ordinary hardcoat anodizing. It is used extensively in aerospace, textile, food processing, packaging, and other industries, where it allows manufacturers to benefit from the light weight and easy machinability...
• MICRO: Product Technology News (May '2000)
  of runs. Copper-Cleaning Products. Arch Chemicals. Norwalk, CT. The Microstrip 6000 series, a line of photoresist stripper and postetch residue cleaner products, was developed for use with copper low-k dielectric dual-damascene interconnect architectures. The safe, completely water-based cleaning...
• Particle Characterization and Rheology links
  links for Physical, Chemical and Other Property Data. Chemical data, with search engine. Di-electric constants: ASI Instruments Inc. extensive list of products with Dielectric Constants. Many of these Dielectric Constants are given at specific temperatures. Chemical Compatibility. Extensive list...
• MICRO:Product Technology News (Oct. '98, p.110)
  heater modules come in turnkey systems operating at 3, 6, 9, or 12 kW. (Semicon Southwest, Booth 1504) Trimethylsilane Dow Corning Midland, MI Nonpyrophoric and noncorrosive, 9-5170 trimethylsilane, semiconductor grade, is a replacement gas for SiH4 in PECVD dielectric film processes...
• MICRO: Wet Surface Technology
  is a modified surface photovoltage instrument that provides immediate, real-time, nondestructive electrical measurements of dielectric films and dielectric/semiconductor interfaces. Since the probe tip of the SCA incorporates a thin Mylar dielectric film that forms the necessary capacitor, the instrument...
• MICRO:June 98:Industry News:Expansions and Acquisitions
  . AlliedSignal buys joint venture AlliedSignal has purchased a joint venture it helped establish one year ago to commercialize low-dielectric insulating materials for chip interconnections. AlliedSignal collaborated with Albuquerque-based Nanopore in the venture, called Nanoglass. Terms...

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