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  • MICRO: Dry Surface Technology
    Heinrich Ollendorf, Stacey Cabral, and Robert Fuller, A common problem associated with the chemical-mechanical planarization (CMP) processes used in damascene sequences is the generation of microscratches. Microscratches form small trenches in the oxide, which are filled with tungsten during CMP
  • Measurement of Pigments with Dry Jet Dispersion Technology (.pdf)
    Pigments are chemical compounds which reflect only certain wavelengths of visible light. This makes them appear colorful. Pigments generally are dry, fine powders that are practically soluble in many usual solvents. Pigments are used because of their color power. The first using of these compounds
  • Comparing cleanroom wipers with a dry abrasion resistance test
    equipment are being cleaned after sputtering, etching, chemical vapor deposition, or chemical-mechanical polishing. The goal of the study reported in this article, therefore, was to develop a dry test that would allow comparison of wipers on the basis of particle release caused by
  • Automated Dosing of Dry Treatment Chemical with Flexible Conveyor Improves Accuracy, Safety of Filtration System
    A manufacturer of high pressure flat-bed, liquid-solid filtration systems uses a Flexicon flexible screw conveyor for consistent and safe delivery of a variety of large quantities of dry chemicals.
  • OSHA Guidance for Reducing Chemical Exposure
    of perchloroethylene in recent years, and modern dry cleaning equipment involves much lower exposures than older style equipment. However, there is still a need to reduce employee exposure to the chemical to reduce any possible health effects that could result from long-term exposure to the chemical. Many dry
  • Dry-film lubrication with PTFE
    Custom compounding of engineered polymers lets designers tailor materials to meet tough mechanical, thermal, and chemical challenges. Edited by Jean M. Hoffman PTFE coatings are used on rubber parts, such as O-rings, to ease assembly, and with the addition of color, to aid in part identification
  • MICRO: Applying statistical methods to implement dry polymer removal techniques
    and Gaetano Caputo, Laura Oggioni, Ernesto Zini, and Arturo Wurthwein, A case study explains how design of experiments and component of variance methods were used to develop chemical recipes for removing postetch residue without hydrofluoric acid wet cleans.. Shrinking IC design rules and the need
  • MICRO:February 1998:Industry News:Order Desk
    Samsung has ordered Auriga-C dry-in/dry-out CMP systems from SpeedFam International for installation at its fab in Kiheung, South Korea. The multimillion-dollar order includes Altair, SpeedFam's in situ end point detection tool for monitoring film thickness in oxide and metal applications
  • Workflow Strategies to Minimize Personnel and Environmental Exposure
    The main focus of this article is on nonsterile hazardous. drug handling processes, but the principles of GLP are applicable with both sterile and nonsterile. chemical handling. We would also make the assertion that there is a higher likelihood of. surface and airborne contamination
  • On-line Measurement of the Size of Silicon Carbide (SiC) Nanoparticles (.pdf)
    to ionising radiation and its chemical and thermal stability. This material may be synthesised using conventional powder metallurgy techniques. More recently, the production of SiC nanoparticles on an industrial scale has been carried out by dry process by means of laser or plasma pyrolysis.
  • Debem Air Operated Diaphragm Pumps
    running and does not require lubricated air. Self-priming dry capacity even with considerable suction head, fine tuning of speed without pressure loss, and the possibility of dry operation without suffering damage mean that these pumps offer unrivalled versatility. In addition, the huge choice
  • PLASMA ETCH INDUCED SURFACE DAMAGE AND ITS IMPACTS ON GaAs SCHOTTKY DIODES
    Dry etch plays a very important role in fabrication of modern IIIV. compound semiconductor devices. Compared to wet chemical. etch, dry etch, which uses reactive gas plasma to remove. substances chemically, has many advantages, such as better. controllability, higher pattern reproducibility
  • MICRO:Building Copperopolis, by Qingyuan Han (Oct '99)
    processes. Because the chemical structure of many low-k materials differs from and is less passive than that of the conventional SiO dielectric, dry strip processes can cause unacceptable undercutting (insufficient selectivity) and fundamentally alter low-k film properties. Consequently, there has been
  • Hydro-Lance TM Collects Airborne Dust During Repackaging/Bagging of Calcium Chloride Beads
    The Plant Manager at Ulrich Chemical Inc. was experiencing corrosion, plugging and subsequent dust collection problems with their existing dry dust collector while packaging hygroscopic and corrosive calcium chloride beads. During rail car transportation and offloading, some of the calcium chloride
  • New AGC Adhesive-Grades Produce Vehicle Fuel Systems and Components Handle Harsh Fuel Mixes and Aggressive Chemicals
    Biofuels and gasolines that contain additives, alcohol and flex fuels like E15 and E85 put new demands on vehicle fuel systems and components that are made from standard compounds. They dry out fuel hoses, causing them to crack, stretch and soften. They can also damage fuel system components, block
  • Fivefactors to Consider When Choosing a Laser Diffraction Particle Size Analyzer (.pdf)
    Measuring particle size is an indispensable step in understanding a material's physical and chemical properties. Of the many particle sizing methods on the market, laser diffraction is one of the most popular because it's a fast, nondestructive technique that can analyze wet and dry samples