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  • MICRO: Dry Surface Technology
    Heinrich Ollendorf, Stacey Cabral, and Robert Fuller, A common problem associated with the chemical-mechanical planarization (CMP) processes used in damascene sequences is the generation of microscratches. Microscratches form small trenches in the oxide, which are filled with tungsten during CMP
  • Measurement of Pigments with Dry Jet Dispersion Technology (.pdf)
    Pigments are chemical compounds which reflect only certain wavelengths of visible light. This makes them appear colorful. Pigments generally are dry, fine powders that are practically soluble in many usual solvents. Pigments are used because of their color power. The first using of these compounds
  • Comparing cleanroom wipers with a dry abrasion resistance test
    equipment are being cleaned after sputtering, etching, chemical vapor deposition, or chemical-mechanical polishing. The goal of the study reported in this article, therefore, was to develop a dry test that would allow comparison of wipers on the basis of particle release caused by
  • Automated Dosing of Dry Treatment Chemical with Flexible Conveyor Improves Accuracy, Safety of Filtration System
    A manufacturer of high pressure flat-bed, liquid-solid filtration systems uses a Flexicon flexible screw conveyor for consistent and safe delivery of a variety of large quantities of dry chemicals.
  • OSHA Guidance for Reducing Chemical Exposure
    of perchloroethylene in recent years, and modern dry cleaning equipment involves much lower exposures than older style equipment. However, there is still a need to reduce employee exposure to the chemical to reduce any possible health effects that could result from long-term exposure to the chemical. Many dry
  • Dry-film lubrication with PTFE
    Custom compounding of engineered polymers lets designers tailor materials to meet tough mechanical, thermal, and chemical challenges. Edited by Jean M. Hoffman PTFE coatings are used on rubber parts, such as O-rings, to ease assembly, and with the addition of color, to aid in part identification
  • MICRO: Applying statistical methods to implement dry polymer removal techniques
    and Gaetano Caputo, Laura Oggioni, Ernesto Zini, and Arturo Wurthwein, A case study explains how design of experiments and component of variance methods were used to develop chemical recipes for removing postetch residue without hydrofluoric acid wet cleans.. Shrinking IC design rules and the need
  • MICRO:February 1998:Industry News:Order Desk
    Samsung has ordered Auriga-C dry-in/dry-out CMP systems from SpeedFam International for installation at its fab in Kiheung, South Korea. The multimillion-dollar order includes Altair, SpeedFam's in situ end point detection tool for monitoring film thickness in oxide and metal applications
  • On-line Measurement of the Size of Silicon Carbide (SiC) Nanoparticles (.pdf)
    to ionising radiation and its chemical and thermal stability. This material may be synthesised using conventional powder metallurgy techniques. More recently, the production of SiC nanoparticles on an industrial scale has been carried out by dry process by means of laser or plasma pyrolysis.
  • Debem Air Operated Diaphragm Pumps
    running and does not require lubricated air. Self-priming dry capacity even with considerable suction head, fine tuning of speed without pressure loss, and the possibility of dry operation without suffering damage mean that these pumps offer unrivalled versatility. In addition, the huge choice