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Dry Polishing Compound

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Abrasive compounds and abrasive slurries are used to improve surface finish or flatness. They often consist of fine abrasives in slurry, bar, powder or paste forms.
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Conduct Research Top

  • Comparing cleanroom wipers with a dry abrasion resistance test
    equipment are being cleaned after sputtering, etching, chemical vapor deposition, or chemical-mechanical polishing. The goal of the study reported in this article, therefore, was to develop a dry test that would allow comparison of wipers on the basis of particle release caused by. MICRO:October...
  • MICRO:Top 40 (Nov '00)
    planarization (CMP) system combines rotational and orbital technologies, providing the stability of an advanced solid polishing platen with the flexibility of orbital system architecture. Designed for logic and ASIC applications, the Momentum dry-in/dry-out wafer processing system integrates four...
  • MICRO:Top 40 (Nov '00)
    planarization (CMP) system combines rotational and orbital technologies, providing the stability of an advanced solid polishing platen with the flexibility of orbital system architecture. Designed for logic and ASIC applications, the Momentum dry-in/dry-out wafer processing system integrates four...
  • MICRO: Products
    The LuminaCu RL-CMP, a 300-mm system for copper planarization processes at the 90-nm technology node and below, is a single-wafer processing tool for polishing copper on soft ultra-low-k dielectrics. Combining a high-linear-velocity component that provides high polishing rates with a low-downforce...
  • MICRO: Products
    backside that come to the surface during backside polishing pose a risk of yield losses. Such defects cause front-surface distortion during lithography exposure and can migrate between processes. The BSIM applies the Surfscan SP1 platform to detect and classify a wide range of defect types and decreases...
  • Using surfactants in iron-based CMP slurries to minimize residual particles
    During recent years, the use of chemical-mechanical planarization (CMP) to remove excess coating material from wafer surfaces has increased dramatically, as has the literature on CMP research. Basically, the CMP process involves polishing wafers using a slurry that combines a chemical component...
  • MICRO:Building Copperopolis (Jan '99)
    chemical-mechanical planarization (CMP) of dual-damascene copper structures therefore will require highly efficient removal of both the copper and barrier layers. But achieving this goal is a challenge because the barrier materials are typically more difficult than copper to planarize using standard polishing...
  • MICRO:Product News
    as seals in wet and dry process environments. The Kalrez UltraPure compounds offer long-term seal integrity for aggressive fab processes. Kalrez Sahara Plasma 8575 resists O2, fluorine plasma, and chlorinated sealing gases, and is suitable for dry plasma CVD and thermal systems. Kalrez 6375UP resists...
  • MICRO:Product Technology News (July '99)
    The PEP Iridia can perform both photoresist and residue removal operations in a single chamber without damaging chips or leaving residue. The dry-plasma process offers a lower cost of ownership than wet chemistries for such applications as postimplant resist and postetch residue removal. Using...
  • MICRO: Products
    levels of precision control in the planarization, delayering, and polishing of advanced materials and substrates for compound semiconductors. For use in R&D, prototype, and small-volume applications, the tool delayers and planarizes SiO2 and metallized depositions. It provides six-sigma capability...

Engineering Web Search: Dry Polishing Compound Top

Mica - Wikipedia, the free encyclopedia
The leading use of dry-ground mica in the US was in joint compound for filling and finishing seams and blemishes in gypsum wallboard (drywall). The
Copper - Wikipedia, the free encyclopedia

Silverhawks' Diamond Pacific lapidary tool catalog. Titan,...
You save time, labor and compound. Vibra-Dry compounds are formulated for pre-polishing and final polishing only.
EBARA Technologies, Inc.
Compound Semiconductor Solar / Photovoltaic Chemical Mechanical Polishing Systems FREX200
See EBARA Technologies, Inc. Information
Society of Manufacturing Engineers
What is greaseless polishing compound? Application and use of greaseless compound
Current and reliable Adhesives & Sealants news stories
Potting and Encapsulating Compound is FDA compliant.
Jiangsu Fengmang Compound Material Science & Tech Group...
Jiangsu Fengmang Compound Material Science & Tech Group Co., Ltd.
ChromaSystemTM Technical Manual ChromaClear? G2-4700STM...
Technical Manual ChromaClear? G2-4700STM Clearcoat (Hyper CureTM - Air Dry and Express Bake) Description ChromaClear? G2-4700STM is an express bake
See DuPont Performance Coatings Profile & Catalog
Low VOC ChromaSystemTM Technical Manual DuPontTM ChromaClear?...
Clear Description ChromaClear? 2400STM is a 2.1 VOC, two-component force dry clearcoat for use on spot, multipanel and overall repairs of OEM
See DuPont Performance Coatings Profile & Catalog
Thermal transfer compound comparison
Thermal transfer compound comparison Review date: 13 March 2002.

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