The PCO2-14 ™ Polyimide Cure solution is a clean process
oven designed for polyimide baking,
curing, and sterilizing applications. Many semiconductor manufacturing environments, front-end machines are adapted for polyimide
curing. This costly process results in equipment typically not suitable for polyimide
curing in terms of cleanliness, inert atmosphere capabilities, cycle time or data acquisition. The PCO2-14 ™ optimizes the polyimide
curing process for semiconductor wafer...
(read more)