Products/Services for Electron Beam Resist

  • Ion Beam Guns and Electron Beam Guns-Image
    Ion Beam Guns and Electron Beam Guns - (62 companies)
    Ion beam guns and electron beam guns produce beams of electrons, ions or other particles for use in chemical and surface analysis, particle physics, resin curing or semiconductor manufacturing. How to Select Ion Beam Guns and Electron Beam Guns... Learn More
  • No Image Available
    Radiation Curable Coatings - (29 companies)
    Radiation curable coatings are cured through exposure to ultraviolet (UV) light or electron beam (EB) irradiation. They provide rapid processing compared to film drying and thermosetting coatings. Radiation curable coatings consist of polymer layers... Search by Specification | Learn More
  • Thin Film Sources-Image
    Thin Film Sources - (77 companies)
    ...with an electric field and a strong magnetic field to generate microwave energy. Due to the fact that the direction of the electric field that accelerates the electron beam is perpendicular to the axis of the magnetic field, magnetrons are sometimes... Learn More
  • Electron Beam Welding Services-Image
    Electron Beam Welding Services - (45 companies)
    Electron beam welding services use a narrow beam with high energy density to weld metals and alloys with a narrower heat effect zone and deeper penetration compared to most other welding processes. How to Select Electron Beam Welding Services... Search by Specification | Learn More
  • Lithography Equipment-Image
    Lithography Equipment - (66 companies)
    Lithography equipment transfers circuit or device patterns onto a substrate using a patterned mask and a beam of light or electrons to selectively expose a photo resist layer. Overlay metrology systems align the pattern masks or reticles. Lithography equipment... Learn More
  • No Image Available
    Electron Beam Processing Equipment - (29 companies)
    Electron beam machines, equipment or systems are used to process materials using a very focused energy source with a very small wavelength. Electron beam machines, equipment or systems are used to process materials. Electron beams provide a very... Learn More
  • No Image Available
    Electron Microscopes - (62 companies)
    Electron microscopes use a focused beam of electrons instead of light to "image " the specimen and gain information as to its structure and composition. Common types of information yielded are topography, morphology, composition and crystallographic... Search by Specification | Learn More
  • No Image Available
    Thin Film Monitors - (58 companies) used to characterize the reflectance of ultra thin gate oxides and chemically amplified deep ultraviolet (UV) photo resist thin films. Reflection high-energy electron diffraction (RHEED) is a process in which electrons arrive at a grazing angle... Search by Specification | Learn More
  • No Image Available
    Electron Multipliers - (13 companies)
    Electron Multipliers detect incident electrons, ions, vacuum UV (VUV), and soft X-ray and intensify the subsequent detected signal through secondary emission. Description: Electron Multipliers are electrical components that detect incident electrons... Learn More
  • No Image Available
    Chilled Beams - (36 companies)
    Chilled Beams are a type of convection HVAC system that are used to heat or cool rooms. Pipes of hot or cold water are passed through the beam. As the beam heats or cools it radiates the warmth or coolness to the surrounding air. Chilled beams... Search by Specification | Learn More

Product News

Conduct Research completely. removed with more aggressive wet and dry strip processes, the. additional rework steps negatively impact the production flow. and ship schedule. One theory that explains the residue issue. after metal deposition is energetic electron radiation cross. linking the photoresist during the E-beam...

...with a mature electron-beam resist system, and the nature of the defect populations produced by the two CAR candidates is contrasted. The tests described in this article were prompted by the findings of a previous study, which compared ZEP7000, a mature E-beam resist from Zeon (Tokyo), with another...

Here, a tightly focused electron beam cuts a pattern into a chemical film covering a wafer of silicon or a similar substance. Acid then etches away the silicon in places resist has been removed. Cornell uses an alternative method called electrospinning. It forces a liquid polymer through a row...

It is important to fabricate high density and high uniformity nano-structures for the realization of quantum wire lasers. In this work, 1.5um-wavelength GalnAsP/InP quantum wire lasers were fabricated by electron beam (EB) lithography, and wet chemical etching followed by embedding organic metal...

...covered in the special sessions are hydrocarbon impurities on the optical surfaces at 157 nm, direct-to-digital holography for wafer defect detection, the effect of a scanned electron beam on an advanced logic device, and SEM inspection of optically invisible defects. The broad-ranging...

...extreme ultraviolet (soft x-ray) and electron beams, which will reduce exposure wavelengths well below 35-nm dimensions, the smallest node in the roadmap. The fabrication of NGL masks presents old and new challenges that stem from both current and upcoming photomask manufacturing technologies...

More Information

Lock Indicates content that may require registration and/or purchase. Powered by IHS Goldfire