Electron Beam Thermal Treatment

Conduct Research

• MICRO: TechEmergent
  damped mode and interact with thermal features in the silicon. The laser also produces excessive electron-hole free carrier "plasma waves." The generation of both thermal and plasma waves by periodic heating causes optical parameters to vary periodically. These optical parameters are detected...
• MICRO: Products
  thermal data from real-time measurements of transient and steady-state temperature. Designed with Bluetooth RF technology for wireless communications, the tool transmits thermal data instantaneously to Thermal MAP software, allowing users to better understand wafer processing environments...
• MICRO: Product Technology News (January 2001)
  009;The TurboMatrix thermal desorber can be used for gas chromatography sampling applications such as analyzing hard-drive components for residual greases and mapping cleanrooms for volatile organics. The GC accessory eliminates the need to manually prepare samples. Its graphical user interface...
• The Significance of Melt Practice on Fatigue Properties (.pdf)
  with statistically. f temperatures were 9°C for Supplier A and 14°C for. Supplier B. The implication of this thermal property and its. detectable differences in carbon level, inclusion content,. influence on fatigue life for a particular environment was. plateau strengths, and Active Austenitic Finish values...
• An Investigation of Diverse Surface Finishes on Fatigue Properties of Superelastic Nitinol Wire (.pdf)
  condition consisted of. various metal removal techniques (etching, pickling,. mechanical polishing) and varying degrees of thermal. oxidation. Thermal Oxidation. The oxidation reaction of a nickel-titanium matrix was. suggested by Zhu, et. al. [6] as following: NiTi + O Ni Ti + TiO Ni Ti + TiO Ni...
• Fatigue Performance of Nitinol Round Wire with Varying Cold Work Reductions (.pdf)
  and transmis-. sion electron microscopy (TEM). Fatigue behavior was. characterized using rotary beam fatigue test equipment man-. ufactured by Positool, Inc. at 3600 rpm in a temperature-. controlled, continuously flowing water bath. Ten specimens. from each cold work condition were tested...
• Eliminating heavily implanted resist in sub-0.25-um devices
  (10 30 keV), coupled with careful control of subsequent thermal processing, minimizes dopant diffusion into the channel regions. Moreover, high beam currents are used to enhance wafer throughput. Charge buildup during resist removal must be minimized, in order to prevent gate oxide voltages from...
• Engineering Films
  coatings alter electrical characteristics. Some processors have developed proprietary antistatic coatings that are cured by electron-beam radiation. Metal coatings produce conductive capabilities and also enhance barrier properties. Often, metallization is used to improve moisture-barrier properties...
• The Effects of Varying Active Af Temperatures on the Fatigue Properties of Nitinol Wire (.pdf)
  . As studied by Pelton et al, changes in mechanical properties of. states through rotary beam fatigue testing, one may generate. Nitinol are closely linked to changes thermal properties by the. data to predict the life expectancy of Nitinol wires. Specimens. Clausius-Clapeyron relationship: with varying...
• Sterilization of Plastics (.pdf)
  products. Irradiation. Irradiation is commonly used for sterilization and can be generated by either gamma rays. from a Cobalt (Co60) source or an electron beam (E-beam). In both cases the cost of. capital equipment is great, but high throughputs will improve the return on investment. 1 Bar: Unit...

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