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  • Designing Safe, Low-cost Vacuum and Exhaust Gas Management Systems for Semiconductor Processes (.pdf)
    Vacuum and exhaust gas management are critical components of semiconductor manufacturing. While these systems are usually hidden away out of sight-and out of mind-in the process tool or the sub fab, they are vital to efficient and safe manufacturing. Vacuum systems remove potentially hazardous
  • F-105 Wet Scrubbers Installed at Semiconductor Wafer Fab in Singapore
    to treat acidic process exhaust. CSP also required that each scrubber be supplied with an energy efficient exhaust fan. After thorough analysis of equipment features and benefits, CSP selected Duall model F105 scrubbers complete with redundant recycle pumps and Duall NH fans. All equipment
  • Scrubber Systems and Exhaust Hoods Utilize Corzan TM CPVC Construction for Corrosive, High Temperature Processes
    OSRAM-Sylvania Corporation has lighting manufacturing facilities in both Versailles, Kentucky and Luquillo, Puerto Rico. At both locations, high temperature HCl and HF processes are used to etch glass and other lighting components. The process baths are extremely concentrated and operated at
  • MICRO:Industry News:Expansions & Acquisitions (Oct '99)
    towers and exhaust scrubbers. Lab tests and field experience prove that the technology can recycle "a significant portion " of the ultrapure water used by SpeedFam-IPEC's Auriga and Auriga C polishers, according to Lucid. Entegris has finally made its debut following a merger announcement earlier
  • Particulate Scrubbing in Metal Processing (.pdf)
    . Metallic Dust Recovery. a potentially explosive situation as well as providing. Exhaust Volume . 2,000—5,000 ACFM). economic product recovery are just a few of the benefits. of the MTV Venturi. Exhaust Temperature . Ambient. Exhaust Pressure . 10” W.C. Contaminant . Aluminum, Manganese. & others
  • Advanced Flow Meter Technology to the Rescue
    In flue gas treatment operations such as the one at the Kotkan Energia's power plant, liquid flow meters are used to measure the amount of circulation water. This water washes combustion (exhaust) gas and flows through the heat exchangers taking the heat from the exhaust gas. This heat is then used
  • Chemical Switch Cuts Costs, Improves Safety (.pdf)
    and Facility Development David vented with an exhaust duct into the scrubber to to try a trial conversion. Because the product is. Scrubber with a tote container of. ABOUT THE COMPANY. BIONOxSOLVER. ChemResearch Co. Inc. delivered in ready-to-use totes, CRC. 1101 West Hilton. personnel don’t handle
  • Foundry Amine Scrubbing (.pdf)
    particles prior to the scrubber. The scrubber was. designed to exhaust up to 3 three core machines at a. maximum volume of 19,000 ACFM containing up to 500. ppmv of TEA. Designed with high efficiency Tellerette®. Application. Aluminum Casting. Core Box. Tower Packing, the unit is achieving greater than 99.5

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