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Conduct Research

Based Slurries for STI and “Self-Stopping” ILD Polishing: Novel Formulations and Mechanistic Understanding. Brian Santora, David Merricks, Sean Frink, Bradley Kraft, Bob Her. Ferro Electronic Material Systems. 1789 Transelco Drive, Penn Yan, New York, 14527. Tel: +1-315-227-5387, Fax...

AN INVESTIGATION OF CERIA-BASED SLURRIES. EXHIBITING REVERSE-PRESTONIAN BEHAVIOUR. David Merricks, Brian Santora, Bob Her, Sean Frink. Ferro Electronic Material Systems. 1789 Transelco Drive, Penn Yan, New York, 14527. email: merricksd@ferro.com. ABSTRACT. New slurry formulations have been...

Planarization in Copper/Low-k Dielectric Integration Schemes RECENT ADVANCES IN CERIA-BASED SLURRIES. FOR STI AND ILD APPLICATIONS. David Merricks, Bob Her, Brian Santora. Ferro Electronic Material Systems. 1789 Transelco Drive, Penn Yan, New York, 14527. email: merricksd@ferro.com. ABSTRACT...

...at the 45nm node and below. Advances in Ceria-Based Slurries for STI and ILD Applications. Evolution and Revolution of Cerium Oxide Slurries in CMP. David Merricks, Brian Santora, Bob Her, Craig Zedwick. Ferro Electronic Material Systems. 1789 Transelco Drive. Penn Yan, NY 14527, USA. merricksd@ferro.com...

...from the use of silica-based slurries. IEMT'01 Template Development and Mechanisms of Action of a Ceria-Based Slurry for Shallow Trench Isolation CMP. David Merricks, Brian Santora, Bob Her, Craig Zedwick. Ferro Electronic Material Systems. 1789 Transelco Drive, Penn Yan, NY 14527, USA...

Ferro Electronic Material Systems. 1789 Transelco Drive. Penn Yan, NY 14527, USA. zedwickc@ferro.com. phone: +1-315-227-5303. fax: +1-315-536-0376. Abstract. Slurry selectivity has become increasingly more important in the minds of CMP. engineers over the last ten to fifteen years. In many ways...

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