of XRF excitation sources with optics and are optimized to provide high brightness in small spots for a variety of thin
film applications. With its own x-ray optics business, Rigaku is well-positioned develop and manufacture X-ray sources for current and future market needs. Applications. Micro-XRR:
film thickness, density, and roughness measurement. Micro-XRF:
film thickness and composition measurement. Micro-XRD: phase, crystallinity, and preferred orientation
evaluation. Thickness measurement...
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