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Flatness Metrology Equipment

 

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Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
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  • Infrared Sensor Graphic Interface PVC Sheet Material
    The WaferSight wafer-flatness tool performs high-resolution and high-throughput mapping of wafer shape, flatness, and thickness variations. Based on proprietary optical laser interferometry, the in-line metrology system is available for 300- and advanced 200-mm wafer processing. Its subnanometer
  • MICRO: Products
    and energy purity. All systems feature the company's control and positioning systems and a common single-wafer end station. A metrology system for advanced lithography tracks with two or more robot arms, Accura C optimizes equipment and system-to-system performance by providing customers with precise
  • Measuring the Right Things at the Right Time Will Add Value to Products and Processes
    is often in the. R&D center because no chips are. cut there and nothing is really made. there. However, by making appropriate. investments in equipment and by push-. ing metrology further upstream to pro-. By investing in the ability to get the right measurements, companies can actually mini-. vide
  • Constant velocity in positioning systems
    Smooth motion is key to precision; Here are some tips on how to get it. An automatic optical inspection rig uses a Bayside custom gantry on a composite base with caged, recirculating bearings. Specs: 0.1-m m resolution; 60-kg moving mass; straightness = +-5 m/400 mm; flatness = 1.27 m/25 mm; 20-kHz
  • MICRO: Archive: Back Issue TOC
    , photoresist coating technology, ozone sensors, ion implanter, DI-water heater, miniature isolation valves, wafer-flatness metrology tool, servomotor, scatterometry acceleration tool, bonded door seals Product Extra: Supplier receives patent for IC and optoelectronic chemistries; sensing tube
  • Product Technology News
    at magnifications >20,000x. A Windows-based interface makes the XL810 easy to use. (Semicon/West, San Francisco, South Hall, Booth 2715) An x-y stage is made specifically for use with 300-mm wafers. Preloaded air bearings and precision granite reference surfaces provide straightness and flatness of travel
  • Tight Squeeze: Optical Imaging For Cramped Quarters
    interfering with the primary process, be it wirebonding, die packaging, aligning wafers, or registration marks before lithography or metrology. A few tips can help manufacturers get up and running with imaging, even if they are unable to afford large optical engineering departments. The primary purpose
  • MICRO: Products
    improve the system's overall equipment effectiveness and efficiency. 3Dmap is an analysis platform that provides 3-D structural metrology for developers and manufacturers of microfluidic devices. The system's high-resolution measurements of size and shape are essential in all phases of microfluidics

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