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Flatness Metrology System
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Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
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Supplier: Mahr Federal Inc.Description: High-precision form and position tolerance checking system for laboratory and measuring room High precision automatic form measuring station for comprehensive evaluation Large measuring volume High loading capacity (high performance) up to 1000 N
- Form Parameters: Coaxiality, Cylindricity, Flatness, Parallelism, Roundness, Runout, Squareness / Angularity, Straightness, Other
- Technology: Contact / Stylus Based
- Standards Compliance: ISO / EN, DIN
- Industrial Applications: Mechanical Parts (Bearings, Shafting), Other
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Supplier: MTI Instruments Inc.Description: The AutoScan 200 and AutoScan 300 are fully automated measurement systems for use in high volume, production environments. Capable of determining thickness, TTV, bow, warp, site and global flatness and resistivity, the AutoScan series utilizes user-defined and ASTM/SEMI scan patterns
- Form Factor: Wafer Probing System, Sensor / Sensing Element
- Mounting / Loading: In-line
- Applications: Semiconductor Wafers
- Measurement Capability: Roughness / Waviness, Shape / Flatness, Thickness - Wafer / Disc (TTV)
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Supplier: MSI-Viking GageDescription: high efficiency Easily accessible turntable for large and heavy parts Patented machine design with a transport and drive system separated from the measuring and reference system Use on shop floor possible
- Measurement Capability: 3D / Areal Topography, Coaxiality, Cylindricity, Flatness, Parallelism, Roundness, Runout, Squareness / Angularity, Straightness, Specialty / Custom
- Surface Metrology: Form Measurement
- Technology: Contact / Stylus Based
- Industrial Applications: Automotive, Mechanical Parts (Bearings, Shafting)
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Supplier: PI (Physik Instrumente) L.P.Description: . These stages feature an ultra-precise, flexure guiding system which confines motion to the XY plane and reduces runout in Z to a few nanometers or less. This unsurpassed trajectory precision is fundamental for highest-precision surface metrology applications. These stages provide a positioning
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Supplier: Zygo CorporationDescription: General IR optical system testing
- Form Parameters: Flatness, Roundness
- Technology: Non-contact - Optical / Laser
- Industrial Applications: Optics / Photonics
- Mounting / Loading: Benchtop
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Supplier: Corning Specialty MaterialsDescription: Designed for volume wafer manufacturing
- Measurement Capability: 3D / Areal Topography, Flatness, Thickness, Warp / Bow
- Surface Metrology: Form Measurement
- Technology: Non-contact - Optical / Laser
- Industrial Applications: Automotive, Mechanical Parts (Bearings, Shafting), Optics / Photonics, Precision Machining / Grinding, Semiconductor Manufacturing
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Supplier: Polytec, Inc.Description: Polytec's TopMap Metro.Lab is an affordable, high-precision, non-contact topography measurement system designed to characterize flat and curved surfaces. Incorporating a scanning white light interferometer, the Metro.Lab can measure flatness and general topography with 20 nanometer resolution
- Measurement Capability: 3D / Areal Topography, Flatness, Parallelism, Roundness
- Technology: Non-contact - Optical / Laser
- Industrial Applications: Aerospace / Defense, Automotive, Other
- Mounting / Loading: Benchtop
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Supplier: Bytewise Measurement SystemsDescription: Use CrossCheck for faster startups and changeovers while reducing product scrap and rework. Easily diagnose root causes of product variation to improve dimensional quality and operator variability, enabling 100% product certification.
- Measurement Capability: Flatness, Step Height, Thickness, Warp / Bow
- Technology: Non-contact - Optical / Laser
- Surface Metrology: 2D / Line Profile, 3D / Areal Topography
- Common Specific Parameters: Average Peak Profile Height (Rpm), Maximum Valley Depth (RV), Peak Count (PC)
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Supplier: Mahr Federal Inc.Description: High-precision form and position tolerance checking system for laboratory and measuring room High precision automatic form measuring station for comprehensive evaluation Large measuring volume High loading capacity (high performance) up to 1000 N
- Form Parameters: Coaxiality, Cylindricity, Flatness, Parallelism, Roundness, Runout, Squareness / Angularity, Straightness, Other
- Technology: Contact / Stylus Based
- Standards Compliance: ISO / EN, DIN
- Industrial Applications: Mechanical Parts (Bearings, Shafting), Other
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Supplier: MTI Instruments Inc.Description: The AutoScan 200 and AutoScan 300 are fully automated measurement systems for use in high volume, production environments. Capable of determining thickness, TTV, bow, warp, site and global flatness and resistivity, the AutoScan series utilizes user-defined and ASTM/SEMI scan patterns
- Form Factor: Wafer Probing System, Sensor / Sensing Element
- Mounting / Loading: In-line
- Applications: Semiconductor Wafers
- Measurement Capability: Roughness / Waviness, Shape / Flatness, Thickness - Wafer / Disc (TTV)
Featured Products for Flatness Metrology System Top
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of non-reflective, as well as reflective surfaces. A black & white monitor is included with these systems. A valuable optional accessory is a computer interface package consisting primarily of a frame-grabber card and proprietary software. With this system, the SPI unit can be hooked-up to a desk-top PC so that the flatness image generated can be saved (bmp format), as well as printed to a conventional printer. These systems are quite accurate, easy to read and provide a fast qualitative... (read more) -
Lapmaster International LLC presents the FTP 130 as a new product addition to its Metrology Line. The FTP 130 is a 3 way measuring system which accurately measures the flatness, thickness and parellelism of both 1 and 2 sided parts. Up to two different functions can be used simultaneously to measure parts as thin as 0.20mm or as thick as 200mm. It also comes with a new analog-digital display that elimates the possibility of any inaccuracies. This unit provides a very cost effective, compact... (read more) -
The Proforma 300SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 200 mm and 300mm wafers, the 300SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around MTI Instruments' exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning at the press of a button. User defined and ASTM/SEMI scan patterns are used... (read more)Browse Wafer and Thin Film Instrumentation Datasheets for MTI Instruments Inc. -
easy search at low magnifications and accurate measurements at high magnifications •User-friendly software •Laser AF facilitates evaluations of cross-sectional shapes and 3D profiling as well as the flatness of workpiece surfaces... (read more)Browse Machine Vision Systems Datasheets for Nikon Metrology, Inc. -
Semi-Automated Wafer Measurement System for Semiconducting and Semi-Insulating Material. The ProformaTM 200SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 75 to 200 mm. wafers, the 200SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around MTI Instruments' exclusive Push-Pull capacitance technology, the Proforma 200SA delivers full wafer surface... (read more)Browse Wafer and Thin Film Instrumentation Datasheets for MTI Instruments Inc. -
Drawing of contexts, sections and site plans can easily consume a huge part of the total excavation time. For particularly complicated and detailed sites this can even rise to as much as half of the total project time. To increase the productivity of these dedicated activities, Nikon Metrology presents the Archeology variant of its iSpace large-scale metrology system. Trials at Mont Beuvray, France, have shown that the Archeology iSpace solution records data 50% to 90% faster compared... (read more)Browse Coordinate Measuring Machines (CMM) Datasheets for Nikon Metrology, Inc. -
We specialize in burr-free cut-off metal parts that offer length and diameter tolerances in the microns, parallelism and flatness less than a micron and squareness in the minutes. Capabilities include proprietary abrasive cutting, grinding (centerless, surface and profile), lapping and polishing of all ferrous and non-ferrous metals. Additionally, all tubing, rod and extrusions can be cut to any shape. Ends are square and parallel, with length/thickness tolerance from ±0.0002" (±0.005 mm... (read more)Browse Cutting Services Datasheets for Metal Cutting Corporation -
Our cleanroom houses an array of custom designed system integrated metrology devices. Our cleanroom facility contains LVDT fulcrum beam measuring systems for high volume measuring of micron tolerances, twin sequential camera vision systems using parallel computer processors for defect identification and dual laser PLC full circumference parallelism and concentricity inspection. Throughout our factory are multi-stage ultrasonic cleaning stations, multiple dimensional diverging graders, single... (read more)Browse Surface Preparation Services Datasheets for Metal Cutting Corporation -
turbine blades, appliance housings and much more. "The HN-6060 multi-sensor system builds upon the Nikon Metrology portfolio of vision systems and 3D solutions." says Myles Richard, Managing Director of Americas for Nikon Metrology, "It addresses the need for fast, high-accuracy 3D inspection of complex shapes by combining innovative optical technology with the highest precision measurement hardware." The newly designed laser scanning sensor extracts the surface form and waviness data in one... (read more)Browse Metallurgical Microscopes Datasheets for Nikon Metrology, Inc. -
and materials available these days, traditional stylus measurement is often not adequate to characterize the functional behavior of surfaces," said Pat Nugent, Vice President of Metrology Systems for Mahr Federal. "The MarSurf WS 1 can provide the three-dimensional recording and evaluation needed, as well as the non-contact measurement required by soft and sensitive materials. In addition, new processes are achieving ever higher levels of surface quality, greatly increasing the need for greater... (read more)Browse Surface Metrology Equipment Datasheets for Mahr Federal Inc.
Conduct Research Top
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Constant velocity in positioning systems
controller/drive module. Constant velocity, = +-1%, while position jitter, m. Note at a 10-kHz sampling rate, jitter frequency = 5 kHz in this case. Precision-positioning systems used for metrology, inspection, printing, DNA assaying, and laser machining are typified by a need for smooth motion...
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Infrared Sensor Graphic Interface PVC Sheet Material
The WaferSight wafer-flatness tool performs high-resolution and high-throughput mapping of wafer shape, flatness, and thickness variations. Based on proprietary optical laser interferometry, the in-line metrology system is available for 300- and advanced 200-mm wafer processing. Its subnanometer...
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MICRO: Products
and energy purity. All systems feature the company's control and positioning systems and a common single-wafer end station. A metrology system for advanced lithography tracks with two or more robot arms, Accura C optimizes equipment and system-to-system performance by providing customers with precise...
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Improved Interferometric Optical Testing
Interferometry is used for testing optical components and optical systems as well as the metrology of many other components, such as the flatness and roughness of hard disk drive platters and the shape of magnetic recording heads and machined parts. This article describes three recent advances...
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MICRO: Products
geometry measurements, the 300-mm Advanced Flatness system measures and reports SEMI-standard wafer shape, flatness, thickness, and resistivity results. The multifunctional wafer-flatness measurement and sorting system can also be used in ultrathin SOI, epitaxial, prepolish, and reclaim wafer...
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Linear Stage Terminology
System Checkout Computing Resolution Computing Max Data Rate Motor Sizing Conversion Tables Glossary. There are many factors that affect the capabilities of a linear stage to position accurately in three-dimensional space. Abbe errors, straightness, flatness, pitch, roll, yaw, hysteresis, backlash...
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Measuring the Right Things at the Right Time Will Add Value to Products and Processes
One of the jobs of metrology system manufacturers is to make better, more sophisticated products. Ironically, however, they are frequently met with the argument that because inspection is essentially a nonvalue-added process, their efforts in product development run counter to their customers...
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MICRO:Product News
with a shared dump rinser for added process complexity. Multiple recipes with 20 steps each provide easy operation and flexibility. The servo enables precise control of delicate items, and the mounting allows the interchangeable use of single and dual cassettes. CD Metrology System. Nanometrics. Milpitas, CA...
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Product Technology News
exhaust filter. The final filters retain 99.97% of particles >=0.3 um and 99.999% of particles >=0.12 um, respectively. (Semicon/West, San Francisco, North Hall, Booth 6454) Metrology System Leica Wetzlar, Germany/Deerfield, IL The LMS IPRO x/y metrology system for photomasks and wafers has...
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MICRO: Tech Emergent
Chandra Saravanan, Zhuan Liu, Weidong Yang, Matthew F. Swisher, and Anlun Tang, Shrinking device dimensions place aggressive demands on defect detection metrology. As device density and critical dimension (CD) uniformity requirements become more stringent, the maximum potential of lithography can...
Engineering Web Search: Flatness Metrology System Top
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Interferometry - Wikipedia, the free encyclopedia In a typical system, illumination is provided by a diffuse source set at the focal plane of a collimating lens. |
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Powertrain - Wikipedia, the free encyclopedia Powertrain of a modern automobile, comprising the wheels, suspension, drive shaft, exhaust system, engine and transmission. |
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Estimation of uncertainty in flatness Minimum Zone... Application and System Modeling (ICCASM 2010) Conference Title: 2010 International Conference on Computer Application and System Modeling (ICCASM |
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A New Noncontact Flatness Measuring System of Large 2-D Flat... Technology Conference - IMTC '95 Item Title: A New Noncontact Flatness Measuring System of Large 2-D Flat Workpiece Publisher Name: IEEE Country: USA |
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Dedicated controller design for a dual-stage opto-mechatronic... notch-hinges (blade) guiding and iii) the blade guiding system (a double-parallelogram system, and the fine stage features a stacked piezoelectric |
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ZMI Primer rev B Better Metrology.TM Outline ? DMI introduction ? Homodyne v.s. Heterodyne ? System components & configurations ? System error sources ? DMI |
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Three-Dimensional Imaging Metrology - IS&T/SPIE Electronic... Three-Dimensional Imaging Metrology (Proceedings Volume) |
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NIST Tech Beat - May 13, 2008 waveguide effect depends on a tunnel?s width, height, surface material and roughness, and the flatness of the floor as well as the signal frequency. See NIST (National Institute of Standards & Technology) Information |
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Netscape | Company Boardroom and analysis capabilities of the Wyko RTI 4100 will enable optics manufacturers, system integrators and assemblers to make a quantum leap in optics |
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Netscape | Company Boardroom Zygo Corporation Receives Order for New Ink Jet Printing Metrology System Zygo Ships First Automated Semiconductor Packaging Metrology System |
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