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MICRO: Archive: Back Issue TOC
, photoresist coating technology, ozone sensors, ion implanter, DI-water heater, miniature isolation valves, wafer-flatness metrology tool, servomotor, scatterometry acceleration tool, bonded door seals Product Extra: Supplier receives patent for IC and optoelectronic chemistries; sensing tube
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Infrared Sensor Graphic Interface PVC Sheet Material
The WaferSight wafer-flatness tool performs high-resolution and high-throughput mapping of wafer shape, flatness, and thickness variations. Based on proprietary optical laser interferometry, the in-line metrology system is available for 300- and advanced 200-mm wafer processing. Its subnanometer
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MICRO: Products
metrology tool that performs lithography process control for the 65-nm node and beyond captures design-rule overlay errors and improves stepper correction accuracy. The Archer AIM uses a grating-style technology to reduce the. MICRO: Products. MICRO Advertiser and Product Information Buyers Guide. Chip
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Linear Stage Terminology
There are many factors that affect the capabilities of a linear stage to position accurately in three-dimensional space. Abbe errors, straightness, flatness, pitch, roll, yaw, hysteresis, backlash, orthogonal alignment, encoder errors, mounting surface, and cantilevered loading all contribute
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MICRO: Products
interferometry for Angstrom-resolution measurement of features from 0.1 nm to 2 mm in height. When equipped with the option, the profiler offers complete MEMS metrology on a single platform. The option performs dynamic measurements and static, white-light profiling of rough surfaces, capturing a series
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MICRO: Products
PTFE-wetted materials. For other mechanical- and chemical-compatibility requirements, PEEK, PPS, or Tefzel are available for the body material, while EPDM, Viton, or perfluoroelastomer are available for the diaphragm material. Wafer-Flatness Metrology Tool. ADE. Westwood, MA. In addition to measuring
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MICRO:Product News
such as point, line, radius, angle, and distance can be used for contour measurement. By teaching the first part in a batch, a program can be developed and recalled to automatically inspect the remaining parts. A semiautomated metrology tool is capable of handling 75- to 200-mm wafers. The Proforma
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Measuring the Right Things at the Right Time Will Add Value to Products and Processes
One of the jobs of metrology system manufacturers is to make better, more sophisticated products. Ironically, however, they are frequently met with the argument that because inspection is essentially a nonvalue-added process, their efforts in product development run counter to their customers