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  • Capillary Tube Thermal Mass Flow Meters & Controllers - A User's Guide
    This paper describes capillary tube mass flow meters and controllers for use in general purpose industrial and laboratory applications and in the fabrication of semiconductor devices. It provides a detailed description of the major components---flow body, flow conditioner, bypass, capillary sensor
  • MICRO:
    and students. the 40 most popular products of 2000, including wafer shipping boxes, transport robots, lithography tools, copper-cleaning products, mass-flow controllers, wafer dryers, copper-stripping systems, and an array of valves, regulators, sensors, pumps, and detectors. Silicon Valley plugs

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