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  • Implantable Neural Prostheses 2
    The techniques covered include biocompatibility and biostability, hermetic packaging , electrochemical techniques for neural stimulation applications, novel electrode materials and testing, thin-film flexible microelectrode arrays, in situ charac- terization of microelectrode arrays, chip-size thin-film device encapsulation, microchip-embedded capacitors and …
  • MEMS Materials and Processes Handbook
    He, C.J. Kim: On-chip hermetic packaging enabled by post-deposition electro- chemical etching of polysilicon.
  • Springer Handbook of Nanotechnology
    He, C.J. Kim: On-chip hermetic packaging en- abled by post-deposition electrochemical etching of polysilicon, Proc. 18th Int. Conf.
  • Springer Handbook of Nanotechnology
    He, C. J. Kim: On-Chip Hermetic Packaging En- abled by Post-Deposition Electrochemical Etching of Polysilicon, Proceedings of the 18th Inter- national Conference on Microelectromechanical Systems (IEEE, Piscataway NJ 2005) pp. 544–547 10.20 S. K. Ghandhi: VLSI Fabrication Principles – …
  • RF MEMS: Theory Design and Technology
    … DC-Contact Series Switches, 161 Fabrication of Lateral DC-Contact Switches, 164 MEMS Release Procedures, 165 Substrate Transfer Process, 167 Fabrication, Substrate Transfer, and Packaging of the Omron DC-Contact Series Switch, 169 6.8 Conventional Hermetic Packaging of MEMS Switches, 171 …
  • Springer Handbook of Nanotechnology
    Fig. 36.7 DMD products in hermetic packages .
  • Microsystems and Nanotechnology
    Hermetic packaging is desirable in most cases because it provides a moisture free environment to avoid charge separation in capacitive devices, corrosion in metallization, or electrolytic conduction, in order to prolong the lifetime of the electronic circuitry.
  • Fundamentals of Microsystems Packaging > FUNDAMENTALS OF SEALING AND ENCAPSULATION
    Finally, the difference in hermetic vs. non- hermetic packaging , and how to achieve reliability without hermeticity, is indicated.