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  • MICRO: Ultrapure Fluid/Slurry Delivery- McMillan (January 2001)
    A microprocessor-based flow controller system has shown several advantages over the traditional peristaltic pump setup in tests run on polishing tools at AMD's Fab 25. Advanced Micro Devices' Fab 25 in Austin, TX, is a high-volume, state-of-the-art microprocessor device production facility. Like
  • MICRO: Prod Tech news
    the system to combine two pumps into a single system (equivalent to a pump and blower package). Featuring low noise and vibration characteristics, the unit has acoustic pressure levels that are 65% lower than those of traditional pumps. The MDrive product line combines high-torque stepping motors
  • MICRO: Green Manufacturing
    that are diluted with relatively high flow rates of nitrogen (N ) from the roughing and cryo pumps. Four traditional abatement methods have the potential to meet this challenge. Water scrubbers using injected chemical enhancers can achieve the efficiency necessary to remove implant effluent materials
  • MICRO: 2001 Back Issues
    , and more Keep your eyes on 17 Roadmap committee steers chipmakers onto faster route with ITRS update U.S. labor survey gives chipmakers high safety marks; critic doubts study s validity Pelchem doubles production of octafluorocyclobutane Applied backs Taiwan R &D fund; Silterra touts fast ramp-up
  • MICRO: Product In Action (July '2000)
    Downtime can be deadly in the semiconductor business, largely because of the high costs of manufacturing and the enormous market pressures to deliver product in a timely manner. Critical system failure can put wafer processing so far behind that lost time becomes difficult to recoup. Serious
  • MICRO:Top 40 - Page 2 (Nov '00)
    A high-flow 3-in. NPT relief valve for corrosive and ultrapure liquids also serves as a back-pressure regulator and bypass valve. The Series RVTX angle-pattern valve is made of Grade 1, Type 1 PVC and comes with a choice of Viton or EPDM elastomeric seal. It can be customized or made of other
  • MICRO: Product Technology News (February 2001)
    prior to shipping. Producing proportions of <50 ppb to 5 ppm, the Series 57 arsine permeation tubes deliver verifiable, low-concentration gas standards. Each stainless-steel tube measures 6 x 1.75 in. and contains a permeation membrane. Eliminating the need for high-pressure cylinders that contain
  • MICRO: Product Technology News (April 2001)
    focus-exposure. A high-flow maglev turbopump has a small design for semiconductor processes. The ATH1600 provides reliable vacuum performance. The pump is suitable for metal etch, dielectric etch, interconnect etch, ion implantation, sputtering, and plasma-enhanced chemical vapor deposition

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