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High Repeatability Metrology Tool
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Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
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Supplier: Nikon Metrology, Inc.Description: Nikon's highest precision automated video measuring system is the "Master Reference Measuring System" for your metrology lab. Nikon's highest precision automated vision system, the NEXIV VMR-H3030, has the best specifications, accuracy and repeatability of any NEXIV measuring system, with a minimum
- System Type: Modular / PC-Based
- Applications / Capabilities: Assembly Quality, Edge Detection, Electronics or Semiconductor Inspection, Flaw Detection, Gauging, Scanning & Dimensioning, Pattern Recognition, Tool & Die Monitoring
- Image Source: Confocal Laser, Other Image Source
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Supplier: Park Systems, Inc.Description: in the market today. Providing the highest resolution and the lowest gauge sigma value for repeatability and reproducibility, the XE-WAFER is the perfect solution for the semiconductor and hard disk drive industries which, until now, had very limited choices for industrial grade in-line inspection tools
- Form Factor: Monitor / Instrument
- Mounting / Loading: Floor Mounted / Stand-alone
- Applications: Semiconductor Wafers
- Measurement Capability: Critical Dimension / Trench Geometry, Defects / ADC, Roughness / Waviness
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Supplier: Bruker Nano Surfaces DivisionDescription: Get the highest performance device characterization and etch depth metrology available with the Dimension Atomic Force Profiler. It is the world's only AFM single-tool fab solution designed for chemical mechanical planarization and etch metrology at 65 nm. Features Combines the outstanding
- Form Factor: Wafer Probing System
- Mounting / Loading: Floor Mounted / Stand-alone
- Applications: Semiconductor Wafers
- Measurement Capability: Critical Dimension / Trench Geometry
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Supplier: Maury Microwave CorporationDescription: The Maury model A020D connector gage kit is an extremely high precision metrology grade test instrument designed to measure type N connectors with either female or male interfaces. Repeatability of ±50 millionths of an inch (±0.00005 inch) is achieved by using precision dial
- Type: Gage Block / Master, Gage Set / Tool Kit
- Technology: Mechanical
- Units: English
- Display: Dial / Analog / Direct Reading Scale
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Supplier: Nikon Metrology, Inc.Description: Nikon's highest precision automated video measuring system is the "Master Reference Measuring System" for your metrology lab. Nikon's highest precision automated vision system, the NEXIV VMR-H3030, has the best specifications, accuracy and repeatability of any NEXIV measuring system, with a minimum
- System Type: Modular / PC-Based
- Applications / Capabilities: Assembly Quality, Edge Detection, Electronics or Semiconductor Inspection, Flaw Detection, Gauging, Scanning & Dimensioning, Pattern Recognition, Tool & Die Monitoring
- Image Source: Confocal Laser, Other Image Source
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Supplier: Park Systems, Inc.Description: in the market today. Providing the highest resolution and the lowest gauge sigma value for repeatability and reproducibility, the XE-WAFER is the perfect solution for the semiconductor and hard disk drive industries which, until now, had very limited choices for industrial grade in-line inspection tools
- Form Factor: Monitor / Instrument
- Mounting / Loading: Floor Mounted / Stand-alone
- Applications: Semiconductor Wafers
- Measurement Capability: Critical Dimension / Trench Geometry, Defects / ADC, Roughness / Waviness
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Supplier: Park Systems, Inc.Description: in the market today. Providing the highest resolution and the lowest gauge sigma value for repeatability and reproducibility, the XE-WAFER is the perfect solution for the semiconductor and hard disk drive industries which, until now, had very limited choices for industrial grade in-line inspection tools
- Application: Semiconductor Inspection
- Grade: Benchtop
- Microscope Type: Scanning Probe / Atomic Force (SPM / AFM)
- Digital Display: Yes
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Supplier: Park Systems, Inc.Description: in the market today. Providing the highest resolution and the lowest gauge sigma value for repeatability and reproducibility, the XE-WAFER is the perfect solution for the semiconductor and hard disk drive industries which, until now, had very limited choices for industrial grade in-line inspection tools
- Application: Semiconductor Inspection
- Grade: Benchtop
- Microscope Type: Scanning Probe / Atomic Force (SPM / AFM)
- Digital Display: Yes
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Supplier: Park Systems, Inc.Description: in the market today. Providing the highest resolution and the lowest gauge sigma value for repeatability and reproducibility, the XE-WAFER is the perfect solution for the semiconductor and hard disk drive industries which, until now, had very limited choices for industrial grade in-line inspection tools
- Application: Semiconductor Inspection
- Grade: Benchtop
- Microscope Type: Scanning Probe / Atomic Force (SPM / AFM)
- Digital Display: Yes
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Supplier: Bruker Nano Surfaces DivisionDescription: Get the highest performance device characterization and etch depth metrology available with the Dimension Atomic Force Profiler. It is the world's only AFM single-tool fab solution designed for chemical mechanical planarization and etch metrology at 65 nm. Features Combines the outstanding
- Form Factor: Wafer Probing System
- Mounting / Loading: Floor Mounted / Stand-alone
- Applications: Semiconductor Wafers
- Measurement Capability: Critical Dimension / Trench Geometry
Featured Products for High Repeatability Metrology Tool Top
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Solar Wafer Thickness Tool from MTI. The PV-1000 is a High speed, multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials. Outstanding accuracy, repeatability and stability are the hallmarks of MTI Instruments' non-contact measurement systems. The new PV-1000 series brings our 40+ years of precision measurement experience to a line of products specifically for the photovoltaic industry. Ideal for both process development... (read more)Browse Semiconductor Metrology Instruments Datasheets for MTI Instruments Inc. -
. In fact, Renishaw's patented taper mount compensates all installation tolerances, including those of the parent mounting surface. Eccentricity and ovality are also corrected by easy, robust and fine adjustment. Specific model information and specifications (Click on the product for additional information). RESR angle encoders (360° high accuracy angle encoder system). SiGNUM ™ RESM angle encoders (high accuracy, resolution, repeatability with high speed, high operating temperature... (read more)Browse Incremental Rotary Encoders Datasheets for Renishaw
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300SA to your process needs. Wafer Specifications. Diameter: 200mm and 300mm. Material: All Semiconducting and Semi-insulating materials. Surfaces: As-cut, Lapped, Etched, Polished, Patterned. Flat/Notch: All SEMI Standard Flat(s) or Notch. Conductivity: P or N Type. Wafer mounting: Bare Wafer, Sapphire/Quartz Base, Tape. Measurements. Thickness and TTV. Bow. Warp. Site and Global Flatness. Advantages. Cost effective alternative to fully automated tools. Full 1000 uM Thickness Measurement Range... (read more)Browse Wafer and Thin Film Instrumentation Datasheets for MTI Instruments Inc.
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The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks. Designed for high-volume manufacturing. The MFM65 is designed with high-volume 200mm and 300mm manufacturing in mind: high-throughput thickness measurement by XRR and XRF, low-contamination wafer... (read more)Browse Semiconductor Metrology Instruments Datasheets for Rigaku Corporation
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operation. Integrated VPD capability enables automatic VPD preparation of one wafer while a TXRF measurement is made on another wafer for the highest sensitivity and high throughput. VPD-TXRF eliminates the operator variability that may occur with ICP-MS, and VPD-TXRF can be completely controlled via factory automation. VPD recovery from selected areas, including the bevel area, is available. Optional Sweeping TXRF software enables mapping of the contaminant distribution over the wafer surface... (read more)Browse Semiconductor Metrology Instruments Datasheets for Rigaku Corporation
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Our cleanroom houses an array of custom designed system integrated metrology devices. Our cleanroom facility contains LVDT fulcrum beam measuring systems for high volume measuring of micron tolerances, twin sequential camera vision systems using parallel computer processors for defect identification and dual laser PLC full circumference parallelism and concentricity inspection. Throughout our factory are multi-stage ultrasonic cleaning stations, multiple dimensional diverging graders, single... (read more)Browse Surface Preparation Services Datasheets for Metal Cutting Corporation
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scan. Previously tactile gear-inspection tools needed to rely on 2D sections of data. This new advancement provides better inspection possibilities, revealing all shape and waviness information in one simple measurement. "What the HN-6060 provides is a much easier, quicker and more precise method of 3D data capture than metrology systems have demonstrated before," says Robert Wasilesky, Senior Vice President of Sales for Nikon Metrology. "The demand for high-accuracy 3D surface metrology systems... (read more)Browse Metallurgical Microscopes Datasheets for Nikon Metrology, Inc.
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Mahr Federal has expanded its offerings in the world of optical surface metrology with the introduction of the MarSurf ™ WS 1. Utilizing white light interferometry in a compact design, the MarSurf WS 1 offers vertical resolution of 0.1 nm (.004 µin) and provides three-dimensional measurement in only a few seconds. Utilizing MarSurf XT 20 topographical evaluation software, the space-saving MarSurf WS 1 can be configured to work both in the lab and on the shop floor. With the new processes... (read more)Browse Surface Metrology Equipment Datasheets for Mahr Federal Inc.
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Metrology. To measure objects with precision, companies frequently turn to PixeLINK® machine vision cameras. Measure Complex Shapes. Organizations looking to measure irregular, complex or precision parts require a machine vision camera solution that offers a high frame rate, excellent image quality and high resolution. For these reasons, companies looking to develop metrology systems for electronics, semiconductors, or any complex manufacturing product choose PixeLINK® industrial cameras... (read more)Browse CCD Cameras Datasheets for PixeLINK
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the broadest range of metrology solutions for applications ranging from miniature electronics to the largest aircrafts. Nikon Metrology's innovative measuring and precision instruments contribute to a high performance design-through-manufacturing process that allows manufacturers to deliver premium quality products in a shorter time. Please click on the links for more information or request a quote today. (read more)Browse Coordinate Measuring Machines (CMM) Datasheets for Nikon Metrology, Inc.
Conduct Research Top
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Resolution, Accuracy and Repeatability
Resources. CAD/3D Catalog. Engineering Reference. Software/Manuals. Motion Control Videos. Site Index. Careers. Home >>Engineering Reference >> Resolution, Accuracy, and Repeatability. ENGINEERING REFERENCE Linear Stage Terminology Rotary Stage Terminology Resolution vs Accuracy Metrology/Testing/Cert...
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MICRO:Analysis & Metrology by Reinhold Ott p.48 (June '99)
and analysis steps are frequently time-consuming and require a high level of user expertise. To perform the identification step, operators must revisit defects at manually selected sites using either an inspection tool, a stand-alone optical review station, or a scanning electron microscope (SEM...
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MICRO: Tool/Fab Strategies
size (135 X 150 mm) and high throughput (100 wafers per hour). Because of the tool's low-optical-distortion characteristics and automatic magnification compensation capabilities (overlay <=0.3 um), it can be easily mixed and matched with reduction stepper systems. In fact, in the metrology portion...
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MICRO: 2004 Greatest Hits
. The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization with excellent...
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MICRO: Prod Tech news
a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization with excellent repeatability. It performs 200- and 300-mm wafer metrology applications and can be configured with any...
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Laser Trackers: Defining Accuracy (.pdf)
accuracy. This white paper is intended to inform the reader of the meaning of accuracy in the context of metrology in general and in particular for the use of a laser tracker instrument. ./486fb60d-d24e-42ed-910e-108018b999de Technology White Paper. Defining Accuracy. Background. Measurement...
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MICRO: Products
, nondestructive Pulse technology, providing metrology for all stages of copper integration, including yield-critical dense narrow-line-array structures in low-k and ultra-low-k interlayer dielectric materials. The system operates on the Vanguard-II platform, which offers high throughput...
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MICRO:Product Technology News (June '99)
printability studies and enables customers to optimize pattern transfer for high productivity and yields. The microscope's ESD-reduction technology, along with advanced metrology algorithms, enables stable photomask images, particularly for DUV MoSI-type phase-shift masks. Full hands-off production...
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MICRO: Critical Material-Wafers
of producing epi wafers. One new technology that promises to dramatically reduce costs is a metrology tool capable of measuring epi-layer resistivity without wafer contact, thereby eliminating the wafer scrap associated with the traditional means of monitoring this specification. Wafer manufacturers have...
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Product Technology News
A high-resolution 200-mm-wafer inspection tool, the XL810 features a Hexalens E-beam column that handles accelerating voltages of 200 V to 30 kV. The SEM-based system obtains resolutions better than 3 nm independent of beam voltage in the 1- to 30-kV range and switches directly between field-free...
Engineering Web Search: High Repeatability Metrology Tool Top
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Optical Comparators | Dial Indicators | Gages Dorsey Metrology International Search form Our ultra high amplification dial indicators offer unmatched accuracy and repeatability. See Dorsey Metrology International, Inc. Information |
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,,WLCD: A new System for Wafer Level CD Metrology on... So, high throughput, high repeatability as well as automated job generation and tool matching are the main requirements for a CD metrology tool. See Carl Zeiss Jena GmbH Information |
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0 The MIT Nanoruler: A Tool for Patterning Nano-Accurate Gratings. |
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Evaluation of Hitachi CAD to CD-SEM Metrology Package for OPC... Evaluation of Hitachi CAD to CD-SEM Metrology Package for OPC Model Tuning and Product Devices OPC Verification Pietro Cantua, Gianfranco Capettia, |
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21st Annual BACUS Symposium on Photomask Technology -... First performance data obtained on next-generation mask metrology tool |
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Manufacturingtalk | The news site for Products and services... Inca rebuilds fixtures on special-purpose tool |
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Manufacturing - SAE Vehicle Engineering Online With the VLD-300, customers get a Mitsui Seiki machine with a laser, not a laser with machine-tool features as secondary. See SAE International Information |
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Hexapod - PI Hexapod Platform, 6 Axis Positioning, Precision... High-Load Hexapods Vacuum Compatible Hexapods Metrology / Laser Systems/... Precision Machining, Diamond Turning |
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Netscape | Company Boardroom |
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Netscape | Company Boardroom The Optium metrology systems complement our process equipment, allowing Veeco to offer the most integrated tool set for accelerated production ramp |
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